JPH02115200U - - Google Patents
Info
- Publication number
- JPH02115200U JPH02115200U JP2317089U JP2317089U JPH02115200U JP H02115200 U JPH02115200 U JP H02115200U JP 2317089 U JP2317089 U JP 2317089U JP 2317089 U JP2317089 U JP 2317089U JP H02115200 U JPH02115200 U JP H02115200U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- grid
- workpiece
- transport
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 230000001133 acceleration Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2317089U JPH0720640Y2 (ja) | 1989-02-28 | 1989-02-28 | 電子線照射装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2317089U JPH0720640Y2 (ja) | 1989-02-28 | 1989-02-28 | 電子線照射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02115200U true JPH02115200U (cs) | 1990-09-14 |
JPH0720640Y2 JPH0720640Y2 (ja) | 1995-05-15 |
Family
ID=31241941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2317089U Expired - Lifetime JPH0720640Y2 (ja) | 1989-02-28 | 1989-02-28 | 電子線照射装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0720640Y2 (cs) |
-
1989
- 1989-02-28 JP JP2317089U patent/JPH0720640Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0720640Y2 (ja) | 1995-05-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6484629A (en) | Method of testing semiconductor element and device therefor | |
JPH02115200U (cs) | ||
JPH0746585B2 (ja) | イオンビーム装置およびイオンビーム形成方法 | |
JPH0375434U (cs) | ||
KR20200140278A (ko) | 하전입자선치료장치 | |
JP2665958B2 (ja) | イオン注入装置の制御装置 | |
JPH0252200U (cs) | ||
JPS63108653A (ja) | イオン中和器 | |
JPH0719036Y2 (ja) | 電子線照射装置 | |
JPS63109438U (cs) | ||
JPS63277095A (ja) | 衣類乾燥装置 | |
JPH0216555U (cs) | ||
JPH0286568U (cs) | ||
Bekmukhambetov et al. | Method of Determining the Work Function of Refractory Metals Under the Action of Ionizing Radiation | |
JPS62149157U (cs) | ||
JPH0415142U (cs) | ||
JPS6457556A (en) | Stage movement controller for electron beam analyzer | |
JPH01152441U (cs) | ||
JPH0214358U (cs) | ||
JPS61122086U (cs) | ||
JPS55122485A (en) | Output device for dc generator | |
DUDNIKOV et al. | Electrohydrodynamic emitters of ion beams(EHLEKTROGIDRODINAMICHESKIE EHMITTERY IONNYKH PUCHKOV) | |
JPH01155251U (cs) | ||
JPH0298952U (cs) | ||
JPH03107948U (cs) |