JPH02114970U - - Google Patents

Info

Publication number
JPH02114970U
JPH02114970U JP2229589U JP2229589U JPH02114970U JP H02114970 U JPH02114970 U JP H02114970U JP 2229589 U JP2229589 U JP 2229589U JP 2229589 U JP2229589 U JP 2229589U JP H02114970 U JPH02114970 U JP H02114970U
Authority
JP
Japan
Prior art keywords
inner layer
hole
small diameter
pattern
diameter signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2229589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2229589U priority Critical patent/JPH02114970U/ja
Publication of JPH02114970U publication Critical patent/JPH02114970U/ja
Pending legal-status Critical Current

Links

JP2229589U 1989-02-28 1989-02-28 Pending JPH02114970U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2229589U JPH02114970U (it) 1989-02-28 1989-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2229589U JPH02114970U (it) 1989-02-28 1989-02-28

Publications (1)

Publication Number Publication Date
JPH02114970U true JPH02114970U (it) 1990-09-14

Family

ID=31240278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2229589U Pending JPH02114970U (it) 1989-02-28 1989-02-28

Country Status (1)

Country Link
JP (1) JPH02114970U (it)

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