JPH0211487B2 - - Google Patents

Info

Publication number
JPH0211487B2
JPH0211487B2 JP59067418A JP6741884A JPH0211487B2 JP H0211487 B2 JPH0211487 B2 JP H0211487B2 JP 59067418 A JP59067418 A JP 59067418A JP 6741884 A JP6741884 A JP 6741884A JP H0211487 B2 JPH0211487 B2 JP H0211487B2
Authority
JP
Japan
Prior art keywords
arm
lanes
ics
transport
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59067418A
Other languages
Japanese (ja)
Other versions
JPS60213621A (en
Inventor
Seiji Kazama
Tomoyoshi Maniwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP6741884A priority Critical patent/JPS60213621A/en
Publication of JPS60213621A publication Critical patent/JPS60213621A/en
Publication of JPH0211487B2 publication Critical patent/JPH0211487B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67271Sorting devices

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明はICハンドラ用の搬送機構に係り、特
に検査ステーシヨンで選別されたICを分類して
搬送する好適な搬送機構に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a transport mechanism for an IC handler, and more particularly to a suitable transport mechanism for classifying and transporting ICs sorted at an inspection station.

〔発明の背景〕[Background of the invention]

ICハンドラはICの自動検査装置に組み込んで
用いられ、多数のICを順次に搬送しつつ検査条
件の温度に予熱若しくは予冷し、検査ステーシヨ
ンに供給し、検査結果に基づいて不良品を排除す
ると共に、検査結果に基づいてグレード分けして
搬送する機能を有する機械装置である。
The IC handler is used by being incorporated into an automatic IC inspection device, and sequentially transports a large number of ICs, preheats or precools them to the temperature specified by the inspection conditions, supplies them to the inspection station, and eliminates defective products based on the inspection results. This is a mechanical device that has the function of grading and transporting products based on inspection results.

前記の検査ステーシヨンは処理能率を上げる為
に複数個設けられ、これに対応して予熱又は予冷
用のレーンも複数列設けられる。また選別分類後
の搬送レーンもグレード別に複数列設けられる。
A plurality of the above-mentioned inspection stations are provided in order to increase processing efficiency, and correspondingly, a plurality of lanes for preheating or precooling are also provided. In addition, multiple transport lanes are provided for each grade after sorting and classification.

従つて、ICハンドラの搬送機構は複数列のレ
ーンからICを受け取り、複数基の検査ステーシ
ヨンに配分し、かつ検査済ICを複数列のレーン
に振り分けなければならない。
Therefore, the transport mechanism of the IC handler must receive ICs from multiple lanes, distribute them to multiple inspection stations, and distribute inspected ICs to multiple lanes.

更に、前記の搬送レーンは、設置所要面積を縮
小するため一般に屈曲せしめて設けられる。この
ため、検査ステーシヨンの前後において搬送方向
を変換する機能を備えた搬送装置が望ましい。
Furthermore, the transport lanes are generally arranged in a curved manner in order to reduce the installation space required. For this reason, it is desirable to have a transport device that has a function of changing the transport direction before and after the inspection station.

〔発明の目的〕[Purpose of the invention]

本発明は上述の事情に鑑みて為されたもので、
4列の予熱又は予冷レーンからICを受け取つて
これを4基の検査ステーシヨンに供給し、検査済
ICを検査結果に基づいて2列乃至4列のレーン
に振り分け、かつ、予熱若しくは予熱レーンの搬
送方向と異なる方向に(例えば直角方向、反対方
向などに)搬出する機能を備えたICハンドラ用
の搬送機構を提供しようとするものである。
The present invention was made in view of the above circumstances, and
Receives ICs from 4 preheating or precooling lanes and supplies them to 4 inspection stations, where they are inspected.
An IC handler with the function of sorting ICs into 2 to 4 lanes based on inspection results, and carrying them out in a direction different from the transport direction of the preheating or preheating lanes (for example, at right angles, in the opposite direction, etc.). The purpose is to provide a transport mechanism.

〔発明の概要〕[Summary of the invention]

上記の目的を達成する為、本発明の搬送機構
は、垂直(地球に対して鉛直の意)な軸の回りに
間欠的に回動する公転アームを設け、該公転アー
ムの先端に垂直軸の回りに自転する自転アームの
中央部を軸支し、上記自転アームの両端にそれぞ
れ更に自転する小アームの中央部を軸支し、か
つ、上記小アームの両端付近にそれぞれIC吸着
手段を設け、前記公転アームの公転に伴う、IC
吸着手段の回動軌跡円の切線方向に設けた4列の
予熱レーン(又は予冷レーン)から搬入された
ICを吸着保持して回動軌跡円上に設けた検査ス
テーシヨンに供給し、かつ、検査済ICを回動軌
跡円の切線方向に搬出するように構成し、かつ、
上記回動軌跡円に沿つた搬送路の途中に不良品排
出ステーシヨン設けたことを特徴とする。
In order to achieve the above object, the transport mechanism of the present invention is provided with a revolving arm that rotates intermittently around a vertical (meaning perpendicular to the earth) axis, and a revolving arm that rotates intermittently around a vertical axis (perpendicular to the earth). a central part of a rotating arm that rotates around its own axis is pivotally supported, a central part of a small arm that further rotates is pivotally supported at each end of the rotating arm, and IC suction means are provided near both ends of each of the small arms, IC due to the revolution of the revolving arm
The material was carried in through four rows of preheating lanes (or precooling lanes) provided in the tangential direction of the rotation locus circle of the suction means.
The IC is configured to be suction-held and supplied to an inspection station provided on a rotation trajectory circle, and the inspected IC is carried out in a tangential direction of the rotation trajectory circle, and
The present invention is characterized in that a defective product discharge station is provided in the middle of the conveyance path along the rotation locus circle.

第1図は本発明の原理的説明図である。 FIG. 1 is an explanatory diagram of the principle of the present invention.

4列のベルトコンベア1a,1b,1c,1d
が間隔Lで平行に設けられている。中心軸2の回
りに間欠的に回動する公転アーム3の先端に、長
さ2Lの自転アーム4の中央が回転駆動し得るよ
うに支承されている。
4 rows of belt conveyors 1a, 1b, 1c, 1d
are provided in parallel with an interval L. The center of a rotating arm 4 having a length of 2L is rotatably supported at the tip of a revolving arm 3 that rotates intermittently around a central axis 2.

上記自転アーム4の両端に、更に長さLの小ア
ーム5の中央が回転駆動し得るように支承されて
いる。そして、上記1対の小アーム5a,5bそ
れぞれの両端に、4個の真空吸着パツド6a,6
b,6c,6dが1個ずつ取り付けられている。
The center of a small arm 5 having a length L is supported at both ends of the rotating arm 4 so as to be rotatably driven. Four vacuum suction pads 6a, 6 are attached to both ends of each of the pair of small arms 5a, 5b.
One each of b, 6c, and 6d is attached.

図示の状態においてはベルトコンベア1c上の
IC7は吸着パツド6cに対向しているが、小ア
ーム5bを1/2回転だけ回動させると吸着パツド
6dがIC7に対向する。このように、小アーム
5bを回動させることによつて吸着パツド6c,
6dの内の何れか任意の吸着パツドによつてIC
7を吸着保持することができる。更に自転アーム
4を1/2回転だけ回動させると吸着パツド6a,
6bの内の何れか任意の吸着パツドによつてベル
トコンベア1c上のIC7を吸着保持することが
できる。
In the illustrated state, on the belt conveyor 1c
The IC7 is opposed to the suction pad 6c, but when the small arm 5b is rotated by 1/2 rotation, the suction pad 6d is opposed to the IC7. In this way, by rotating the small arm 5b, the suction pads 6c,
IC by any suction pad of 6d.
7 can be held by suction. When the rotating arm 4 is further rotated by 1/2 rotation, the suction pad 6a,
The IC 7 on the belt conveyor 1c can be held by suction by any one of the suction pads 6b.

以上の作用から明らかなように、自転アーム4
の中央部を回転駆動可能に支承すると共に、上記
自転アームの両端にそれぞれ更に自転する小アー
ム5a,5bの中央を軸支し、かつ上記小アーム
の両端部にそれぞれ吸着パツド6a〜6dを設け
ると、上記4個の吸着パツド6a〜6dの内の任
意の1個でコンベア1c上のIC7を吸着保持す
ることができる。同様の理由で、4列のコンベア
1a〜1dの内の任意のコンベア上のIC(図示省
略)を吸着することもできる。
As is clear from the above action, the rotating arm 4
The central part of the arm is rotatably supported, and the centers of small arms 5a and 5b which rotate on their own axis are also pivotally supported at both ends of the rotating arm, and suction pads 6a to 6d are provided at both ends of the small arms, respectively. The IC 7 on the conveyor 1c can be held by suction with any one of the four suction pads 6a to 6d. For the same reason, ICs (not shown) on any one of the four conveyors 1a to 1d can also be attracted.

また、吸着パツド6bがIC7′を吸着保持して
いる場合、このIC7′を4列のコンベア1a〜1
dの内の任意のコンベア上に搭載することもでき
る。
In addition, when the suction pad 6b suction-holds the IC7', the IC7' is transferred to the four rows of conveyors 1a to 1.
It can also be mounted on any conveyor in d.

同様の理由により、4個の吸着パツド6a〜6
dのそれぞれが吸着保持しているIC(図示せず)
を任意のコンベア(1a〜1dの内の一つ)に搭
載することもできる。
For the same reason, the four suction pads 6a to 6
ICs each of d holds by suction (not shown)
can also be loaded on any conveyor (one of 1a to 1d).

更に、第1図に示した公転アームを回動させる
と、それぞれの吸着パツド6a〜6dに吸着保持
されたIC(図示せず)は中心軸2の回りに同心円
状の軌跡を描いて搬送される。
Furthermore, when the revolving arm shown in FIG. 1 is rotated, the ICs (not shown) suctioned and held by the respective suction pads 6a to 6d are conveyed in a concentric trajectory around the central axis 2. Ru.

前述の如くICの吸着、搭載と搬送とを行なう
ため、前記の公転アーム3、自転アーム4、小ア
ーム5は、それぞれ制御されて間欠的に回動し得
る構造になつている。
In order to adsorb, mount, and transport the IC as described above, the revolving arm 3, the rotating arm 4, and the small arm 5 have a structure that allows them to rotate intermittently under control.

〔発明の実施例〕[Embodiments of the invention]

第2図は、前述の原理(第1図)に基づいて4
列のプリヒータ8a,8b,8c,8dによつて
搬送されるIC7を4基の検査ステーシヨン9a,
9b,9c,9dに供給し、該IC7を検査結果
に従つて4列の搬送レーン10a,10b,10
c,10dに振り分けるように構成した本発明の
搬送機構の1実施例の平面図である。
Figure 2 shows the 4
The ICs 7 transported by the rows of preheaters 8a, 8b, 8c, and 8d are transferred to four inspection stations 9a,
9b, 9c, 9d, and the IC7 is transferred to four transport lanes 10a, 10b, 10 according to the inspection results.
FIG. 3 is a plan view of an embodiment of the conveying mechanism of the present invention configured to distribute the information into two groups: c and 10d.

前記のプリヒータ8a〜8dはICを搬送しつ
つ検査条件の温度まで予熱する装置であつて、第
1図の原理図に示したベルトコンベア1a〜1d
に対応する構成部分である。
The preheaters 8a to 8d are devices that preheat the IC to the temperature of the inspection conditions while conveying it, and are connected to the belt conveyors 1a to 1d shown in the principle diagram of FIG.
This is the component corresponding to .

第1図の原理図と同一の図面参照番号を付した
中心軸2、公転アーム3、自転アーム4、小アー
ム5a,6a、及び真空吸着パツド6a〜6dは
それぞれ原理図について説明した構成部材に対応
する部材である。
The central axis 2, the revolving arm 3, the rotating arm 4, the small arms 5a, 6a, and the vacuum suction pads 6a to 6d, which are given the same drawing reference numbers as in the principle diagram of FIG. 1, are the same components as explained in the principle diagram. This is a corresponding member.

図示の同心状の円弧11a,11b,11c,
11dは、1対の小アーム5a,5bを自転アー
ム4と平行姿勢とし該自転アーム4を公転アーム
3と平行姿勢にしたとき、4個の真空吸着パツド
6a〜6dが公転軸3の回動に伴つて描く軌跡を
示している。
The illustrated concentric arcs 11a, 11b, 11c,
11d shows that when the pair of small arms 5a and 5b are placed in a parallel position with the rotating arm 4 and the rotating arm 4 is placed in a parallel position with the revolving arm 3, the four vacuum suction pads 6a to 6d move around the rotating axis 3. It shows the trajectory drawn as a result.

前記のプリヒータ8a〜8d、及び搬送レーン
10a〜10dはそれぞれ上記の軌跡円弧11a
〜11dの切線方向に設置する。
The preheaters 8a to 8d and the transport lanes 10a to 10d each follow the trajectory arc 11a.
- Install in the direction of the tangential line of 11d.

本実施例においては、ICを搬入する側のプリ
ヒータ8a〜8dの搬送方向矢印aに対して、
ICを搬出する側の搬送レーン10aの搬送方向
を矢印bの如く180゜反転させて設けてあるが、本
発明を実施する際搬出側の搬送方向を矢印cの如
く90゜変換させ、若しくは矢印dの如く任意の方
向に変換させることもできる。
In this embodiment, with respect to the transport direction arrow a of the preheaters 8a to 8d on the side into which the ICs are transported,
The transport direction of the transport lane 10a on the side where ICs are taken out is reversed by 180 degrees as shown by arrow b, but when carrying out the present invention, the transport direction on the transport side is reversed by 90 degrees as shown by arrow c, or It is also possible to transform in any direction as shown in d.

前記の同心円弧11a〜11d上に、その法線
E方向に並べて検査ステーシヨン9a〜9dを設
けると共に、法線F方向に並べて検査不良品アン
ローデイングステーシヨン12a〜12dを設け
る。本発明を実施する際、上記の各ステーシヨン
(9a〜9d及び12a〜12d)は、それぞれ
同心円弧11a〜11d上に設置するが、必ずし
も法線E,F方向に揃えなくても良い。
Inspection stations 9a to 9d are arranged on the concentric arcs 11a to 11d in the direction of the normal line E, and inspection defective product unloading stations 12a to 12d are arranged in the direction of the normal line F. When carrying out the present invention, the above-mentioned stations (9a to 9d and 12a to 12d) are installed on the concentric arcs 11a to 11d, respectively, but they do not necessarily have to be aligned in the directions of the normals E and F.

以上のように構成した搬送機構の使用方法の1
例について次に説明する。この使用例においては
検査ステーシヨン9a〜9dにおける検査の結
果、明確な不良品と判定されたICは不良品アン
ローデイングステーシヨン12a〜12dの内の
何れかに落とし、検査の結果再検査すべきものと
判定されたICは搬送レーン10aに、いわゆる
特採品と判定されたICは搬送レーン10bに、
検査合格2級品は搬送レーン10cに、検査合格
1級品は搬送レーン10dに、それぞれ振り分け
るものとする。
1. How to use the transport mechanism configured as above
An example will be explained next. In this usage example, ICs that are clearly determined to be defective as a result of the inspection at the inspection stations 9a to 9d are dropped to one of the defective product unloading stations 12a to 12d, and as a result of the inspection, it is determined that they should be re-inspected. The ICs that have been selected are placed in the transport lane 10a, and the ICs that have been determined to be specially selected items are placed in the transport lane 10b.
It is assumed that second-class products that pass the inspection are distributed to the transport lane 10c, and first-class products that pass the test are distributed to the transport lane 10d.

第1図に示したように小アーム5a,5b、及
び自転アーム4を公転アーム3と平行な姿勢にす
ると4個の真空吸着パツド6a〜6d相互の間隔
がLとなる。この状態で公転アーム3を第2図の
法線Gの如くプリヒータ8a〜8dと垂直な方向
に回動させると、各真空吸着パツド6a〜6dは
それぞれプリヒータ8a〜8b終点部のIC7に
対向する。この状態で公転アーム3の回動を瞬時
的に停止させ、4個のIC7を吸着保持し、公転
アーム3を法線E位置まで回動させて一時的に停
止させ、保持していた4個のIC7をそれぞれ検
査ステーシヨン9a〜9dに供給する。
As shown in FIG. 1, when the small arms 5a, 5b and the rotating arm 4 are placed in a posture parallel to the revolving arm 3, the distance between the four vacuum suction pads 6a to 6d becomes L. In this state, when the revolving arm 3 is rotated in a direction perpendicular to the preheaters 8a to 8d as per the normal line G in FIG. . In this state, the rotation of the revolving arm 3 is momentarily stopped, the four ICs 7 are adsorbed and held, the revolving arm 3 is rotated to the normal E position and temporarily stopped, and the four ICs that were being held are IC7 is supplied to each of the inspection stations 9a to 9d.

検査を終えたICを再び吸着保持して図の右回
り方向に回動し、法線F上を通過する際、検査不
良品と判定されたICを不良品アンローデイング
ステーシヨン12a〜12dの何れか一つに落下
させて搬送する。
The IC that has been inspected is sucked and held again, rotated clockwise in the figure, and as it passes on the normal line F, the IC determined to be defective is transferred to one of the defective product unloading stations 12a to 12d. Drop them all together and transport them.

検査不良品以外のICを吸着保持したまま法線
Fを通過した後、自転アーム4および小アーム5
a,5bを回転させ、4個の真空吸着パツド6a
〜6dが吸着保持しているICのグレードに応じ
てそれぞれの吸着パツド6a〜6dを搬送レーン
10a〜10dの何れかに対向させてICを受渡
しする。
After passing through the normal F while holding ICs other than inspection defective products by suction, the rotating arm 4 and the small arm 5
Rotate a and 5b and remove the four vacuum suction pads 6a.
The suction pads 6a to 6d are placed opposite to one of the transport lanes 10a to 10d to transfer the ICs, depending on the grade of the ICs that are suctioned and held by the suction pads 6a to 6d.

1例の搬送レーン(10a〜10dの内の何れ
か一つ)に受渡すべきICが2個以上有るときな
ど、同時に複数個のICの受渡しができないとき
は自転アーム4および小アーム5a,5bを順次
に180゜ずつ回動させつつ順次に受渡しを行なう。
When multiple ICs cannot be delivered at the same time, such as when there are two or more ICs to be delivered to one transport lane (any one of 10a to 10d), the rotating arm 4 and small arms 5a, 5b are used. The parts are sequentially rotated by 180° and delivered in sequence.

上記の実施例から明らかなように、本発明の搬
送機構は、4列の予熱又は予冷レーンから受け取
つたICを4基の検査ステーシヨンに供給し、検
査済ICを4列の搬送レーンに振り分ける機能を
有しているが、上記4列のレーン又は4基のステ
ーシヨンの1部を休止させ、若しくは1部の設置
を省略することも勿論可能である。
As is clear from the above embodiments, the transport mechanism of the present invention has the function of supplying ICs received from four rows of preheating or precooling lanes to four inspection stations, and distributing inspected ICs to four rows of transport lanes. However, it is of course possible to suspend some of the four lanes or four stations, or omit the installation of some of them.

また、本発明の機構を2組以上設けることによ
り、4の倍数列のレーンと4の倍数基のステーシ
ヨン間の搬送、振分けを行い得ることも明らかで
あり、更にその1部を休止、省略することもでき
る。
It is also clear that by providing two or more sets of the mechanisms of the present invention, it is possible to perform transportation and distribution between lanes in multiples of 4 and stations in multiples of 4, and furthermore, it is possible to suspend or omit part of them. You can also do that.

〔発明の効果〕〔Effect of the invention〕

以上詳述したように、本発明のロータリ搬送機
構は、4列の予熱又は予冷レーンからICを受け
取つてこれを4基の検査ステーシヨンに供給し、
検査済ICを検査結果に基づいて不良品排出ステ
ーシヨンに放出し、若しくは、2列乃至4列のレ
ーンに振り分け、かつ、予熱若しくは予熱レーン
の搬送方向と異なる方向に搬出することができる
という優れた実用的効果を奏する。
As detailed above, the rotary transport mechanism of the present invention receives ICs from four rows of preheating or precooling lanes and supplies them to four inspection stations.
It is an excellent product that can discharge inspected ICs to a defective product discharge station based on the inspection results, or sort them into 2 to 4 lanes, and carry them out in a direction different from the transport direction of the preheating or preheating lanes. It has practical effects.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のロータリ式搬送機構の原理的
説明図、第2図は本発明のロータリ式搬送機構の
1実施例の平面図である。 1a〜1d…ベルトコンベア、2…中心軸、3
…公転アーム、4…自転アーム、5a,5b…小
アーム、6a〜6d…真空吸着パツド、7,7′
…IC、8a〜8d…プリヒータ、9a〜9d…
検査ステーシヨン、10a〜10d…搬送レー
ン、11a〜11d…同心円弧、12a〜12d
…検査不良品アンローデイングステーシヨン。
FIG. 1 is an explanatory diagram of the principle of the rotary conveyance mechanism of the present invention, and FIG. 2 is a plan view of one embodiment of the rotary conveyance mechanism of the present invention. 1a to 1d...belt conveyor, 2...center shaft, 3
...Revolving arm, 4...Rotating arm, 5a, 5b...Small arm, 6a-6d...Vacuum suction pad, 7, 7'
...IC, 8a-8d...Preheater, 9a-9d...
Inspection station, 10a-10d...transport lane, 11a-11d...concentric arc, 12a-12d
...Inspection defective product unloading station.

Claims (1)

【特許請求の範囲】 1 ICハンドラ用のIC搬送・選別機能を備えた
搬送機構において、 (a) 垂直な軸の回りに間欠的に回動する公転アー
ムを設けると共に、該公転アームの先端部に垂
直軸の回りに自転する自転アームの中央部を軸
支し、かつ、上記自転アームの両端にそれぞれ
更に自転する小アームの中央部を軸支すると共
に、上記小アームの両端付近にそれぞれIC吸
着手段を設け、 (b) 前記公転アームの公転に伴う前記IC吸着手
段の軌跡円の接線方向に、予熱レーン及び予冷
レーンの少なくとも何れかの4列を平行に設置
すると共に、上記軌跡円の接線方向に複数の搬
出用搬送レーンを平行に設置し、更に、 (c) 前記軌跡円上にIC検査ステーシヨン、及び、
不良品排出ステーシヨンを設けたこと、 を特徴とするICハンドラ用ロータリ搬送機構。
[Scope of Claims] 1. A transport mechanism for an IC handler equipped with an IC transport and sorting function, which includes (a) a revolving arm that rotates intermittently around a vertical axis, and a distal end of the revolving arm; The central part of a rotating arm that rotates around a vertical axis is pivotally supported, and the central part of a small arm that further rotates is pivotally supported at both ends of the rotating arm, and ICs are installed near both ends of the small arm. (b) At least four rows of preheating lanes and precooling lanes are installed in parallel in the tangential direction of the locus circle of the IC suction means as the revolving arm revolves; A plurality of unloading conveyance lanes are installed in parallel in the tangential direction, and further, (c) an IC inspection station is installed on the trajectory circle, and
A rotary transport mechanism for an IC handler, characterized by the following: a defective product discharge station is provided.
JP6741884A 1984-04-06 1984-04-06 Rotary transport mechanism for ic handler Granted JPS60213621A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6741884A JPS60213621A (en) 1984-04-06 1984-04-06 Rotary transport mechanism for ic handler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6741884A JPS60213621A (en) 1984-04-06 1984-04-06 Rotary transport mechanism for ic handler

Publications (2)

Publication Number Publication Date
JPS60213621A JPS60213621A (en) 1985-10-25
JPH0211487B2 true JPH0211487B2 (en) 1990-03-14

Family

ID=13344338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6741884A Granted JPS60213621A (en) 1984-04-06 1984-04-06 Rotary transport mechanism for ic handler

Country Status (1)

Country Link
JP (1) JPS60213621A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005054005A1 (en) * 2005-11-10 2007-05-24 Robert Bosch Gmbh Transfer device for reorienting piece goods
DE202016004428U1 (en) 2016-07-20 2017-10-23 Barry-Wehmiller Papersystems, Inc. Device for applying data carriers to a carrier web

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5097075A (en) * 1973-12-28 1975-08-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5097075A (en) * 1973-12-28 1975-08-01

Also Published As

Publication number Publication date
JPS60213621A (en) 1985-10-25

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