JPH02113816U - - Google Patents

Info

Publication number
JPH02113816U
JPH02113816U JP1989021917U JP2191789U JPH02113816U JP H02113816 U JPH02113816 U JP H02113816U JP 1989021917 U JP1989021917 U JP 1989021917U JP 2191789 U JP2191789 U JP 2191789U JP H02113816 U JPH02113816 U JP H02113816U
Authority
JP
Japan
Prior art keywords
focus
error signal
mirror surface
control circuit
servo control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989021917U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989021917U priority Critical patent/JPH02113816U/ja
Publication of JPH02113816U publication Critical patent/JPH02113816U/ja
Pending legal-status Critical Current

Links

JP1989021917U 1989-02-27 1989-02-27 Pending JPH02113816U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989021917U JPH02113816U (ko) 1989-02-27 1989-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989021917U JPH02113816U (ko) 1989-02-27 1989-02-27

Publications (1)

Publication Number Publication Date
JPH02113816U true JPH02113816U (ko) 1990-09-12

Family

ID=31239570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989021917U Pending JPH02113816U (ko) 1989-02-27 1989-02-27

Country Status (1)

Country Link
JP (1) JPH02113816U (ko)

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