JPH02113329U - - Google Patents

Info

Publication number
JPH02113329U
JPH02113329U JP2190089U JP2190089U JPH02113329U JP H02113329 U JPH02113329 U JP H02113329U JP 2190089 U JP2190089 U JP 2190089U JP 2190089 U JP2190089 U JP 2190089U JP H02113329 U JPH02113329 U JP H02113329U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
pedestal
shaped depression
semiconductor
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2190089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2190089U priority Critical patent/JPH02113329U/ja
Publication of JPH02113329U publication Critical patent/JPH02113329U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
JP2190089U 1989-02-27 1989-02-27 Pending JPH02113329U (US20020095090A1-20020718-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2190089U JPH02113329U (US20020095090A1-20020718-M00002.png) 1989-02-27 1989-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2190089U JPH02113329U (US20020095090A1-20020718-M00002.png) 1989-02-27 1989-02-27

Publications (1)

Publication Number Publication Date
JPH02113329U true JPH02113329U (US20020095090A1-20020718-M00002.png) 1990-09-11

Family

ID=31239537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2190089U Pending JPH02113329U (US20020095090A1-20020718-M00002.png) 1989-02-27 1989-02-27

Country Status (1)

Country Link
JP (1) JPH02113329U (US20020095090A1-20020718-M00002.png)

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