JPH02113258U - - Google Patents
Info
- Publication number
- JPH02113258U JPH02113258U JP2272889U JP2272889U JPH02113258U JP H02113258 U JPH02113258 U JP H02113258U JP 2272889 U JP2272889 U JP 2272889U JP 2272889 U JP2272889 U JP 2272889U JP H02113258 U JPH02113258 U JP H02113258U
- Authority
- JP
- Japan
- Prior art keywords
- base
- holding ring
- board
- folded part
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
- Electron Beam Exposure (AREA)
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2272889U JPH02113258U (lv) | 1989-02-27 | 1989-02-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2272889U JPH02113258U (lv) | 1989-02-27 | 1989-02-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02113258U true JPH02113258U (lv) | 1990-09-11 |
Family
ID=31241101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2272889U Pending JPH02113258U (lv) | 1989-02-27 | 1989-02-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02113258U (lv) |
-
1989
- 1989-02-27 JP JP2272889U patent/JPH02113258U/ja active Pending