JPH02113254U - - Google Patents

Info

Publication number
JPH02113254U
JPH02113254U JP2117389U JP2117389U JPH02113254U JP H02113254 U JPH02113254 U JP H02113254U JP 2117389 U JP2117389 U JP 2117389U JP 2117389 U JP2117389 U JP 2117389U JP H02113254 U JPH02113254 U JP H02113254U
Authority
JP
Japan
Prior art keywords
electrode
metal plate
manifolds
pair
cooling pipes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2117389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2117389U priority Critical patent/JPH02113254U/ja
Publication of JPH02113254U publication Critical patent/JPH02113254U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP2117389U 1989-02-23 1989-02-23 Pending JPH02113254U (US06346242-20020212-C00066.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2117389U JPH02113254U (US06346242-20020212-C00066.png) 1989-02-23 1989-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2117389U JPH02113254U (US06346242-20020212-C00066.png) 1989-02-23 1989-02-23

Publications (1)

Publication Number Publication Date
JPH02113254U true JPH02113254U (US06346242-20020212-C00066.png) 1990-09-11

Family

ID=31238171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2117389U Pending JPH02113254U (US06346242-20020212-C00066.png) 1989-02-23 1989-02-23

Country Status (1)

Country Link
JP (1) JPH02113254U (US06346242-20020212-C00066.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013045747A (ja) * 2011-08-26 2013-03-04 Toshiba Corp イオン源用電極及びその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013045747A (ja) * 2011-08-26 2013-03-04 Toshiba Corp イオン源用電極及びその製造方法

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