JPH02113071U - - Google Patents

Info

Publication number
JPH02113071U
JPH02113071U JP2289889U JP2289889U JPH02113071U JP H02113071 U JPH02113071 U JP H02113071U JP 2289889 U JP2289889 U JP 2289889U JP 2289889 U JP2289889 U JP 2289889U JP H02113071 U JPH02113071 U JP H02113071U
Authority
JP
Japan
Prior art keywords
fluid
inner cylinder
outer cylinder
cylinder
fluid inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2289889U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2289889U priority Critical patent/JPH02113071U/ja
Publication of JPH02113071U publication Critical patent/JPH02113071U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Flow Control (AREA)
  • Self-Closing Valves And Venting Or Aerating Valves (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案を適用する一般的な流量調整装
置の縦断面図、第2図は内筒の平均表面粗さRa
μmと外筒の平均表面粗さRaμmとの関係にお
ける有効な相互平均表面粗さ領域を示すグラフで
ある。 1……流体出口、2……流体通過孔、3……外
筒、3A……外筒の外周面、4……流体入口、5
……流体流入孔、6……弾性部材(コイルスプリ
ング)、7……内筒、7A……内筒の外周面。
Figure 1 is a vertical cross-sectional view of a general flow rate adjustment device to which the present invention is applied, and Figure 2 is the average surface roughness Ra of the inner cylinder.
It is a graph showing an effective mutual average surface roughness area in the relationship between μm and the average surface roughness Raμm of the outer cylinder. 1...Fluid outlet, 2...Fluid passage hole, 3...Outer cylinder, 3A...Outer peripheral surface of outer cylinder, 4...Fluid inlet, 5
...Fluid inlet hole, 6...Elastic member (coil spring), 7...Inner cylinder, 7A...Outer peripheral surface of inner cylinder.

Claims (1)

【実用新案登録請求の範囲】 流体出口に連通する流体通過孔を有する外筒と
流体入口に連通する流体流入孔を有する内筒とを
備え、前記内筒に作用する流体の差圧に応じて前
記内筒を弾性部材を介して外筒内で移動可能に形
成することにより、外筒に形成する前記流体通過
孔の開孔面積を内筒により可変させて流体入口か
ら流体出口へ吐出する流体量を一定に制御するよ
うにした流量調整装置において、前記外筒と内筒
とはセラミツクスからなり、かつ外筒の内周面の
平均表面粗さRaμm=Xと、それに摺接する内
筒の外周面の平均表面粗さRaμm=Yとの関係
が次式を満足することを特徴とする流量調整装置
。 Y=AX+R 但し、A=−4/7〜−3/7 R=0.4〜1.35 X≦1.1,Y≦1.1
[Claims for Utility Model Registration] An outer cylinder having a fluid passage hole communicating with a fluid outlet and an inner cylinder having a fluid inflow hole communicating with a fluid inlet, the system having a fluid inlet that communicates with a fluid inlet, and which is configured to respond to the differential pressure of the fluid acting on the inner cylinder. By forming the inner cylinder to be movable within the outer cylinder via an elastic member, the opening area of the fluid passage hole formed in the outer cylinder is varied by the inner cylinder, and the fluid is discharged from the fluid inlet to the fluid outlet. In a flow rate regulating device that controls a constant amount, the outer cylinder and the inner cylinder are made of ceramics, and the average surface roughness of the inner circumferential surface of the outer cylinder is Raμm=X, and the outer circumference of the inner cylinder in sliding contact therewith. A flow rate adjusting device characterized in that the relationship between the average surface roughness of the surface Raμm=Y satisfies the following equation. Y=AX+R However, A=-4/7~-3/7 R=0.4~1.35 X≦1.1, Y≦1.1
JP2289889U 1989-02-27 1989-02-27 Pending JPH02113071U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2289889U JPH02113071U (en) 1989-02-27 1989-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2289889U JPH02113071U (en) 1989-02-27 1989-02-27

Publications (1)

Publication Number Publication Date
JPH02113071U true JPH02113071U (en) 1990-09-10

Family

ID=31241424

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2289889U Pending JPH02113071U (en) 1989-02-27 1989-02-27

Country Status (1)

Country Link
JP (1) JPH02113071U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012504739A (en) * 2008-10-03 2012-02-23 ビーイー・エアロスペース・インコーポレーテッド Cleaning valve for vacuum disposal system
JP2019167982A (en) * 2018-03-22 2019-10-03 株式会社不二工機 Electric valve

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121371A (en) * 1983-12-01 1985-06-28 Sanyo Electric Co Ltd Flow-rate regulator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121371A (en) * 1983-12-01 1985-06-28 Sanyo Electric Co Ltd Flow-rate regulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012504739A (en) * 2008-10-03 2012-02-23 ビーイー・エアロスペース・インコーポレーテッド Cleaning valve for vacuum disposal system
JP2019167982A (en) * 2018-03-22 2019-10-03 株式会社不二工機 Electric valve

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