JPH02113018U - - Google Patents
Info
- Publication number
- JPH02113018U JPH02113018U JP2253889U JP2253889U JPH02113018U JP H02113018 U JPH02113018 U JP H02113018U JP 2253889 U JP2253889 U JP 2253889U JP 2253889 U JP2253889 U JP 2253889U JP H02113018 U JPH02113018 U JP H02113018U
- Authority
- JP
- Japan
- Prior art keywords
- supply passage
- air supply
- bearing gap
- table guide
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003068 static effect Effects 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000002861 polymer material Substances 0.000 claims 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2253889U JPH02113018U (enExample) | 1989-02-27 | 1989-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2253889U JPH02113018U (enExample) | 1989-02-27 | 1989-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02113018U true JPH02113018U (enExample) | 1990-09-10 |
Family
ID=31240746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2253889U Pending JPH02113018U (enExample) | 1989-02-27 | 1989-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02113018U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006043434A1 (ja) * | 2004-10-18 | 2006-04-27 | Nikon Corporation | 軸受装置及びステージ装置並びに露光装置 |
-
1989
- 1989-02-27 JP JP2253889U patent/JPH02113018U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006043434A1 (ja) * | 2004-10-18 | 2006-04-27 | Nikon Corporation | 軸受装置及びステージ装置並びに露光装置 |