JPH02113018U - - Google Patents

Info

Publication number
JPH02113018U
JPH02113018U JP2253889U JP2253889U JPH02113018U JP H02113018 U JPH02113018 U JP H02113018U JP 2253889 U JP2253889 U JP 2253889U JP 2253889 U JP2253889 U JP 2253889U JP H02113018 U JPH02113018 U JP H02113018U
Authority
JP
Japan
Prior art keywords
supply passage
air supply
bearing gap
table guide
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2253889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2253889U priority Critical patent/JPH02113018U/ja
Publication of JPH02113018U publication Critical patent/JPH02113018U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP2253889U 1989-02-27 1989-02-27 Pending JPH02113018U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2253889U JPH02113018U (enrdf_load_stackoverflow) 1989-02-27 1989-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2253889U JPH02113018U (enrdf_load_stackoverflow) 1989-02-27 1989-02-27

Publications (1)

Publication Number Publication Date
JPH02113018U true JPH02113018U (enrdf_load_stackoverflow) 1990-09-10

Family

ID=31240746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2253889U Pending JPH02113018U (enrdf_load_stackoverflow) 1989-02-27 1989-02-27

Country Status (1)

Country Link
JP (1) JPH02113018U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006043434A1 (ja) * 2004-10-18 2006-04-27 Nikon Corporation 軸受装置及びステージ装置並びに露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006043434A1 (ja) * 2004-10-18 2006-04-27 Nikon Corporation 軸受装置及びステージ装置並びに露光装置

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