JPH02112327U - - Google Patents
Info
- Publication number
- JPH02112327U JPH02112327U JP1918889U JP1918889U JPH02112327U JP H02112327 U JPH02112327 U JP H02112327U JP 1918889 U JP1918889 U JP 1918889U JP 1918889 U JP1918889 U JP 1918889U JP H02112327 U JPH02112327 U JP H02112327U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- sealed chamber
- liquid raw
- chamber
- extended
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims 6
- 239000006185 dispersion Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989019188U JPH0725225Y2 (ja) | 1989-02-20 | 1989-02-20 | 蒸発気体定量取出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989019188U JPH0725225Y2 (ja) | 1989-02-20 | 1989-02-20 | 蒸発気体定量取出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02112327U true JPH02112327U (zh) | 1990-09-07 |
JPH0725225Y2 JPH0725225Y2 (ja) | 1995-06-07 |
Family
ID=31234480
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989019188U Expired - Lifetime JPH0725225Y2 (ja) | 1989-02-20 | 1989-02-20 | 蒸発気体定量取出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0725225Y2 (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0747201A (ja) * | 1993-08-06 | 1995-02-21 | Toshiba Corp | 気化装置 |
CN114269965A (zh) * | 2019-08-27 | 2022-04-01 | 东京毅力科创株式会社 | 原料气体供给系统和原料气体供给方法 |
WO2022075111A1 (ja) * | 2020-10-07 | 2022-04-14 | 東京エレクトロン株式会社 | 気化装置、ガス供給装置及びガス供給装置の制御方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62261864A (ja) * | 1986-05-06 | 1987-11-14 | 三菱電機株式会社 | ヒ−トポンプ装置 |
JPS63108102A (ja) * | 1986-10-25 | 1988-05-13 | バブコツク日立株式会社 | 脱気装置 |
-
1989
- 1989-02-20 JP JP1989019188U patent/JPH0725225Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62261864A (ja) * | 1986-05-06 | 1987-11-14 | 三菱電機株式会社 | ヒ−トポンプ装置 |
JPS63108102A (ja) * | 1986-10-25 | 1988-05-13 | バブコツク日立株式会社 | 脱気装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0747201A (ja) * | 1993-08-06 | 1995-02-21 | Toshiba Corp | 気化装置 |
CN114269965A (zh) * | 2019-08-27 | 2022-04-01 | 东京毅力科创株式会社 | 原料气体供给系统和原料气体供给方法 |
WO2022075111A1 (ja) * | 2020-10-07 | 2022-04-14 | 東京エレクトロン株式会社 | 気化装置、ガス供給装置及びガス供給装置の制御方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0725225Y2 (ja) | 1995-06-07 |