JPH0211157U - - Google Patents

Info

Publication number
JPH0211157U
JPH0211157U JP8766688U JP8766688U JPH0211157U JP H0211157 U JPH0211157 U JP H0211157U JP 8766688 U JP8766688 U JP 8766688U JP 8766688 U JP8766688 U JP 8766688U JP H0211157 U JPH0211157 U JP H0211157U
Authority
JP
Japan
Prior art keywords
source
hearth
evaporation
housed
evaporation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8766688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8766688U priority Critical patent/JPH0211157U/ja
Publication of JPH0211157U publication Critical patent/JPH0211157U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8766688U 1988-06-30 1988-06-30 Pending JPH0211157U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8766688U JPH0211157U (US06815460-20041109-C00097.png) 1988-06-30 1988-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8766688U JPH0211157U (US06815460-20041109-C00097.png) 1988-06-30 1988-06-30

Publications (1)

Publication Number Publication Date
JPH0211157U true JPH0211157U (US06815460-20041109-C00097.png) 1990-01-24

Family

ID=31312267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8766688U Pending JPH0211157U (US06815460-20041109-C00097.png) 1988-06-30 1988-06-30

Country Status (1)

Country Link
JP (1) JPH0211157U (US06815460-20041109-C00097.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744171B2 (US06815460-20041109-C00097.png) * 1979-01-29 1982-09-20
JPS6346461B2 (US06815460-20041109-C00097.png) * 1980-07-24 1988-09-14 Fujitsu Ltd

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744171B2 (US06815460-20041109-C00097.png) * 1979-01-29 1982-09-20
JPS6346461B2 (US06815460-20041109-C00097.png) * 1980-07-24 1988-09-14 Fujitsu Ltd

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