JPH0211156U - - Google Patents
Info
- Publication number
- JPH0211156U JPH0211156U JP8766588U JP8766588U JPH0211156U JP H0211156 U JPH0211156 U JP H0211156U JP 8766588 U JP8766588 U JP 8766588U JP 8766588 U JP8766588 U JP 8766588U JP H0211156 U JPH0211156 U JP H0211156U
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- recess
- evaporation source
- hearth liner
- liner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8766588U JPH0211156U (el) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8766588U JPH0211156U (el) | 1988-06-30 | 1988-06-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0211156U true JPH0211156U (el) | 1990-01-24 |
Family
ID=31312266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8766588U Pending JPH0211156U (el) | 1988-06-30 | 1988-06-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0211156U (el) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62180067A (ja) * | 1986-02-03 | 1987-08-07 | Matsushita Electric Ind Co Ltd | 電子ビ−ム蒸着装置および電子ビ−ム蒸着方法 |
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1988
- 1988-06-30 JP JP8766588U patent/JPH0211156U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62180067A (ja) * | 1986-02-03 | 1987-08-07 | Matsushita Electric Ind Co Ltd | 電子ビ−ム蒸着装置および電子ビ−ム蒸着方法 |