JPH02111002A - Variable inductor device - Google Patents
Variable inductor deviceInfo
- Publication number
- JPH02111002A JPH02111002A JP26454388A JP26454388A JPH02111002A JP H02111002 A JPH02111002 A JP H02111002A JP 26454388 A JP26454388 A JP 26454388A JP 26454388 A JP26454388 A JP 26454388A JP H02111002 A JPH02111002 A JP H02111002A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- coil
- inductance
- superconducting thin
- variable inductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims abstract description 36
- 230000035699 permeability Effects 0.000 claims abstract description 16
- 239000002887 superconductor Substances 0.000 claims abstract description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 10
- 239000010408 film Substances 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 10
- 239000007788 liquid Substances 0.000 abstract description 7
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 2
- 230000001419 dependent effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000005415 magnetization Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、インダクタンスコイル中で、超電導薄膜をコ
イルに対して回転させることによシ、コイルのインダク
タンスを元々の値より減少させて、インダクタンスの値
を調節する可変インダクタ装置である。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention reduces the inductance of the coil from its original value by rotating a superconducting thin film relative to the coil in an inductance coil, thereby increasing the inductance value. This is a variable inductor device that adjusts the
従来の技術
超電導体を、そのマイスナー効果を利用して磁性材料と
して用い、インダクタンスの芯として使用するというア
イデアは、古くからあった。Conventional technology The idea of using superconductors as magnetic materials by utilizing their Meissner effect and as the core of inductance has been around for a long time.
発明が解決しようとする課題
しかしながら、Ｐ ｂ 、 Ｎ ｂ ３Ｔ を等の従来
の超電導材料ではその転移温度Ｔｃが低く、インダクタ
ンス用磁性材料として使用するためには、液体ヘリウム
を使用しなければならず、たいへん高価な動作費用が必
要であった。Problems to be Solved by the Invention However, conventional superconducting materials such as P b and N b 3T have a low transition temperature Tc, and in order to be used as a magnetic material for inductance, liquid helium must be used. , requiring very high operating costs.
更に従来の受動素子では、コンデンサや抵抗は簡単に可
変素子が、作製できたのであるが、インダクタンスＬの
場合、その構造上、高性能で簡便な可変素子を作製する
ことが困難であり、その改善が望まれていた。Furthermore, with conventional passive elements, variable elements such as capacitors and resistors can be easily fabricated, but in the case of inductance L, due to its structure, it is difficult to fabricate a high-performance and simple variable element. Improvement was desired.
課題を解決するための手段
本発明では、酸化物超電導体の薄膜を基板上に作製しそ
のｌｊり膜を、インダクタンスコイルの軸に垂直な回転
軸の回りに回転させＬを減少させることによシ可変イン
ダクター素子を作製する。この時、超電導薄膜素材とし
て、たとえば銅を含む酸化物超電導体を使うと、液体窒
素温度程度の温度７７にで動作可能となシ、高価な液体
ヘリウムで冷却する必要は消滅する。Means for Solving the Problems In the present invention, a thin film of an oxide superconductor is produced on a substrate, and the Lj film is rotated around a rotation axis perpendicular to the axis of an inductance coil to reduce L. A variable inductor element is manufactured. At this time, if an oxide superconductor containing copper, for example, is used as the superconducting thin film material, it can operate at a temperature 77 about the temperature of liquid nitrogen, eliminating the need for cooling with expensive liquid helium.
また、この可変インダクター素子自体の構造が非常に単
純であるので、微少化、高密度作製化が可能となる。Furthermore, since the structure of the variable inductor element itself is very simple, miniaturization and high-density fabrication are possible.
更に、磁芯として超電導体を使用しているので、ＩＧＨ
ｚ程度の高周波領域まで安定に、Ｌを可変動作できる。Furthermore, since a superconductor is used as the magnetic core, IGH
L can be stably varied up to a high frequency region of about z.
以上の方法で、非常に簡単な構造で小型の可変インダク
ター素子を、液体窒素温度で動作させることが可能とな
った。With the method described above, it has become possible to operate a small variable inductor element with a very simple structure at liquid nitrogen temperature.
作 用
薄膜作製用の基板上に布製した超電導薄膜の透磁率は負
の値を持ち、その絶対値は外部磁界と薄膜との成す角度
に大きく依存する。透磁率の絶対値は、外部磁界が１漢
表面と垂直である時、最大値をとり、逆に平行の時０と
なる。それ故、インダクタンスコイル内に、このコイル
の中心軸と垂直方向に超電導薄膜の回転軸を作製する。The magnetic permeability of a superconducting thin film fabricated on a substrate for fabricating a working thin film has a negative value, and its absolute value largely depends on the angle formed between the external magnetic field and the thin film. The absolute value of magnetic permeability takes the maximum value when the external magnetic field is perpendicular to the surface of the magnetic field, and becomes 0 when it is parallel to the surface. Therefore, a rotation axis of the superconducting thin film is created in the inductance coil in a direction perpendicular to the central axis of this coil.
この時、インダクタンスの磁芯である超電導薄膜をコイ
ル内で回転させると、中心軸と膜面の成す角度によって
磁芯の有効透磁率が変化するので、コイルのインダクタ
ンスを変化させることができる。この変化は、透磁率が
負の値を持つため、超電導薄膜面が中心軸に垂直な時、
全体のＬは最小となシ、平行な時、最大となる。更に、
このインダクターは、磁芯に超電導体を用いているため
に、高周波領域中でも、可変インダクタンスとして安定
に動作するために、信頼性のよい素子ができる。At this time, when the superconducting thin film, which is the magnetic core of the inductance, is rotated within the coil, the effective magnetic permeability of the magnetic core changes depending on the angle formed between the central axis and the film surface, so the inductance of the coil can be changed. This change occurs because the magnetic permeability has a negative value, so when the superconducting thin film surface is perpendicular to the central axis,
The overall L is minimum, and maximum when parallel. Furthermore,
Since this inductor uses a superconductor for its magnetic core, it operates stably as a variable inductance even in the high frequency range, making it a highly reliable element.
実施例
本実施例に用いた超電導薄膜は、たとえばスパッタ法に
よシ作製したＢ１５ｒＣａＣｕＯ膜であシ、膜厚は約２
０００人であり、１０２にで電気抵抗は完全に０となる
。この他にＴ Ｉ Ｂ ａ Ｃａ Ｃｕ Ｏ膜、ランタ
ノイド−ＢａＣｕＯ膜なども使用可能である。Example The superconducting thin film used in this example is, for example, a B15rCaCuO film prepared by sputtering, and the film thickness is approximately 2.
000 people, and the electrical resistance becomes completely 0 at 102. In addition, a T I B a Ca Cu O film, a lanthanide-BaCuO film, etc. can also be used.
第１図は本発明の実施例の一例を示す模式図である。第
１図のように、インダクタンスコイ／ｌ／１１の内部に
、回転軸１２の付いた超電導薄膜１３とその基板１４を
設置する。回転軸１２はコイルの中心軸と垂直となって
いる。またコイ／Ｉ／１の内径は、薄膜の外周とほぼ一
致している。更に基板１４や回転軸１２は絶縁体でかつ
非磁性体で作製されておシ、素子の電気的磁気的性質に
何ら影響を与えないように工夫された。FIG. 1 is a schematic diagram showing an example of an embodiment of the present invention. As shown in FIG. 1, a superconducting thin film 13 with a rotating shaft 12 and its substrate 14 are installed inside the inductance coil/l/11. The rotation axis 12 is perpendicular to the central axis of the coil. Further, the inner diameter of Koi/I/1 almost coincides with the outer circumference of the thin film. Further, the substrate 14 and the rotating shaft 12 are made of an insulating and non-magnetic material so as not to affect the electrical and magnetic properties of the element.
この素子のインダクタンスを測定する前に、使用する超
電導薄膜の透磁率を、測定磁場と膜面との成す角度θに
ついて、ｒｆ−３ＱＵＩＤを用いて測定した。この時の
配置を第２図に、この実験結果を第３図に示す。外部磁
場１００ｅ以内では、磁化曲線は、はぼ直線となシ、透
磁率が定義できる。この煩きは、負であり、直線の傾き
、すなわち透磁率はθに大きく依存する。このように、
微少な磁場領域では、超電導薄膜は小連結の第一種超電
導体であると考えられ、その磁化はＭ＝−Ｈｅ：ｔ／４
ｉ（１−ｎ）
と表わせる。ここにＭは超″ｒ［導体の磁化、Ｈｅｘは
外部磁界、ｎは反磁場係数である。薄膜の場合、Ｈｅｘ
が膜面と垂直の時はｎ＝＝１−δとなる。δは完全な
平面の反磁場係数の補正係数である。この場合、δ＝０
．００１となって、透磁率の稙ば、４．２にで約−１３
００（ｃｑｓ ｕｎｉｔ ） ７７にで１３０となっ
た。θが減少するにつれて、透磁率の絶対値は急速に減
少し、０−、ｏでは透磁率は、はぼ０となった。Before measuring the inductance of this element, the magnetic permeability of the superconducting thin film used was measured with respect to the angle θ formed by the measurement magnetic field and the film surface using RF-3QUID. The arrangement at this time is shown in FIG. 2, and the experimental results are shown in FIG. 3. Within the external magnetic field 100e, the magnetization curve is almost a straight line, and the magnetic permeability can be defined. This difficulty is negative, and the slope of the straight line, that is, the magnetic permeability, depends largely on θ. in this way,
In the small magnetic field region, the superconducting thin film is considered to be a first-class superconductor with small connections, and its magnetization is M=-He:t/4
It can be expressed as i(1-n). Here, M is the super-r[magnetization of the conductor, Hex is the external magnetic field, and n is the demagnetizing field coefficient. In the case of a thin film, Hex
When is perpendicular to the film surface, n==1-δ. δ is a correction factor for the demagnetizing field coefficient of a perfect plane. In this case, δ=0
．． 001, and the permeability is 4.2, which is about -13.
00 (cqs unit) became 130 in 77. As θ decreases, the absolute value of magnetic permeability decreases rapidly, and at 0- and o, the magnetic permeability is almost 0.
この測定は、直流測定であるが、約ＩＧＨｚ程度の高周
波領域までこの特性が現れる。Although this measurement is a direct current measurement, this characteristic appears up to a high frequency region of about IGHz.
さて、この超電導薄膜を可動磁芯としたインダクタンス
コイルを第１図のように作製した。超電導Ｂ１５ｒＣａ
ＣｕＯ薄膜１３は、Ｍｇｏ単結晶の基板１４に作製しで
ある。このＭｑＯ基板１４の大きさは１０Ｘ１０Ｘ０．
５絹であり、コイル内で回転するための軸は、石英で作
製した。この基板１４も回転軸１２も、絶縁体で、かつ
非磁性体であり、この素子を液体窒素温度に冷やしても
、インダクタンス動作に対しては何ら影響を与えないこ
とが確かめられた。コイルは、この超電導薄膜の周囲に
１行うようにして、約数１０ｔｕｒｎの銅線を巻いた。Now, an inductance coil using this superconducting thin film as a movable magnetic core was fabricated as shown in Fig. 1. Superconducting B15rCa
The CuO thin film 13 was fabricated on a substrate 14 of Mgo single crystal. The size of this MqO substrate 14 is 10X10X0.
5 silk, and the shaft for rotation within the coil was made of quartz. Both the substrate 14 and the rotating shaft 12 are insulating and non-magnetic, and it was confirmed that even if this element was cooled to liquid nitrogen temperature, it would have no effect on the inductance operation. The coil was made by winding approximately several tens of turns of copper wire around this superconducting thin film once.
コイルのインダクタンスは、約７０ ＭＨｚまで、ベク
トルインビーダンヌメータを用いて測定した。The inductance of the coil was measured up to approximately 70 MHz using a vector in-vehicle dunnmeter.
この時の測定磁場は６０ ｍ Ｏｅ以下であると考えら
れる。このインダクタンスコイルだけのＬは約１．８μ
Ｈであった。コイルのＬの周波数特性は、かなり高周波
まで平坦であった。第３図にその結果を示すが、５ｏＭ
Ｈｚ以上の周波数でのＬの増加はＬＣ共振によるものと
思われる。次に回転軸を回して、７７Ｋに冷やし、コイ
ルの作る磁場と膜面が垂直になるように超電導薄膜磁芯
をセットすると、Ｌの値は減少してゆき約１μＨで最小
となった。これは、超電導磁芯の負の透磁率によるもの
であると思われる。θ−９０°の時、前と同様にＬの周
波数依存性を測定すると（第４図）やはシ周波数に対し
て、平坦な特性を示す。The measured magnetic field at this time is considered to be 60 m Oe or less. The L of this inductance coil alone is approximately 1.8μ
It was H. The frequency characteristics of the coil L were flat up to fairly high frequencies. The results are shown in Figure 3, and 5oM
The increase in L at frequencies above Hz is likely due to LC resonance. Next, the rotating shaft was turned, the temperature was cooled to 77K, and the superconducting thin film core was set so that the magnetic field created by the coil was perpendicular to the film surface.The value of L decreased until it reached a minimum value of about 1 μH. This seems to be due to the negative magnetic permeability of the superconducting magnetic core. When the frequency dependence of L is measured as before at θ-90° (FIG. 4), it shows a flat characteristic with respect to the frequency.
超電導薄膜自体の周波数特注は、原理的には約ＩＧＨｚ
程度まで透磁率の変化はないはずであるから、第４
図の結果は正しいと考えられる。In principle, the frequency customization of the superconducting thin film itself is approximately IGHz.
There should be no change in magnetic permeability to a certain degree, so the fourth
The results shown in the figure are considered correct.
更に透磁率の絶対値が大きい試料を用いたシ、コイル内
の超電導薄膜の枚数を増やせば、更に大きくＬの値を連
続的に減少させることができる。Furthermore, if a sample with a large absolute value of magnetic permeability is used and the number of superconducting thin films in the coil is increased, the value of L can be continuously decreased even further.
第４図に、本発明のデバイヌのＬの値と、角度θの実験
値を示す。θ＝９０°の時、Ｌは最小となり、Ｏ＝Ｑの
時、インダクタンスコイル本来の値を回復する。FIG. 4 shows the value of Devine's L and the experimental value of the angle θ of the present invention. When θ=90°, L becomes minimum, and when O=Q, the inductance coil recovers its original value.
発明の効果
以上、述べてきたように本発明によれば、液体窒素温度
で動作し、簡単な構造を持ち、連続的にインダクタンス
の値を変化させうる可変インダクターが作製可能となシ
、その影響は大きい。Effects of the Invention As described above, according to the present invention, it is possible to manufacture a variable inductor that operates at liquid nitrogen temperature, has a simple structure, and can continuously change the value of inductance. is big.
第１図は本発明の可変インダクターの模式図、第２図は
外部磁場と薄膜との位置関係を示す図、第３図は外部磁
場と薄膜平面の角度θを変化させた時の磁化曲線図、第
４図はインダクタンスの周波数依存性図である。
１１・・・・・・インダクタンスコイル、１２・・・・
・・回転軸、１３・・・・・・超電導薄膜、１４・・・
・・・基板。
図
図
第２図
Ｈ（Ｏｅ）Fig. 1 is a schematic diagram of the variable inductor of the present invention, Fig. 2 is a diagram showing the positional relationship between the external magnetic field and the thin film, and Fig. 3 is a diagram of the magnetization curve when the angle θ between the external magnetic field and the thin film plane is changed. , FIG. 4 is a frequency dependence diagram of inductance. 11... Inductance coil, 12...
... Rotating shaft, 13... Superconducting thin film, 14...
···substrate. Figure 2 H (Oe)
Claims (3)
イルの内部に配置され、前記薄膜と前記インダクタンス
コイルとのなす角度を可変としたことを特徴とする可変
インダクター装置。(1) A variable inductor device characterized in that a superconducting thin film produced on a base is disposed inside an inductance coil, and the angle between the thin film and the inductance coil is variable.
って透磁率の値が変化することを利用することを特徴と
する特許請求の範囲第１項記載の可変インダクター装置
。(2) The variable inductor device according to claim 1, which utilizes the fact that the value of magnetic permeability changes depending on the angle formed between the magnetic field by the coil and the superconducting thin film.
用いたことを特徴とする特許請求の範囲第１項記載の可
変インダクター装置。(3) The variable inductor device according to claim 1, wherein an oxide superconductor containing copper is used as the superconducting thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26454388A JPH02111002A (en) | 1988-10-20 | 1988-10-20 | Variable inductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26454388A JPH02111002A (en) | 1988-10-20 | 1988-10-20 | Variable inductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02111002A true JPH02111002A (en) | 1990-04-24 |
Family
ID=17404730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26454388A Pending JPH02111002A (en) | 1988-10-20 | 1988-10-20 | Variable inductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02111002A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007158360A (en) * | 1999-07-16 | 2007-06-21 | Lucent Technol Inc | Article equipped with variable inductor |
-
1988
- 1988-10-20 JP JP26454388A patent/JPH02111002A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007158360A (en) * | 1999-07-16 | 2007-06-21 | Lucent Technol Inc | Article equipped with variable inductor |
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