JPH02110804U - - Google Patents
Info
- Publication number
- JPH02110804U JPH02110804U JP1880989U JP1880989U JPH02110804U JP H02110804 U JPH02110804 U JP H02110804U JP 1880989 U JP1880989 U JP 1880989U JP 1880989 U JP1880989 U JP 1880989U JP H02110804 U JPH02110804 U JP H02110804U
- Authority
- JP
- Japan
- Prior art keywords
- array element
- measured
- light spot
- light
- focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1880989U JPH0642163Y2 (ja) | 1989-02-20 | 1989-02-20 | 光学式形状測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1880989U JPH0642163Y2 (ja) | 1989-02-20 | 1989-02-20 | 光学式形状測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02110804U true JPH02110804U (xx) | 1990-09-05 |
JPH0642163Y2 JPH0642163Y2 (ja) | 1994-11-02 |
Family
ID=31233780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1880989U Expired - Lifetime JPH0642163Y2 (ja) | 1989-02-20 | 1989-02-20 | 光学式形状測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0642163Y2 (xx) |
-
1989
- 1989-02-20 JP JP1880989U patent/JPH0642163Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0642163Y2 (ja) | 1994-11-02 |