JPH02110803U - - Google Patents

Info

Publication number
JPH02110803U
JPH02110803U JP1880889U JP1880889U JPH02110803U JP H02110803 U JPH02110803 U JP H02110803U JP 1880889 U JP1880889 U JP 1880889U JP 1880889 U JP1880889 U JP 1880889U JP H02110803 U JPH02110803 U JP H02110803U
Authority
JP
Japan
Prior art keywords
light spot
defocus
light
measuring device
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1880889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0710244Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1880889U priority Critical patent/JPH0710244Y2/ja
Publication of JPH02110803U publication Critical patent/JPH02110803U/ja
Application granted granted Critical
Publication of JPH0710244Y2 publication Critical patent/JPH0710244Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1880889U 1989-02-20 1989-02-20 光学式形状測定装置 Expired - Lifetime JPH0710244Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1880889U JPH0710244Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1880889U JPH0710244Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Publications (2)

Publication Number Publication Date
JPH02110803U true JPH02110803U (US06566495-20030520-M00011.png) 1990-09-05
JPH0710244Y2 JPH0710244Y2 (ja) 1995-03-08

Family

ID=31233778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1880889U Expired - Lifetime JPH0710244Y2 (ja) 1989-02-20 1989-02-20 光学式形状測定装置

Country Status (1)

Country Link
JP (1) JPH0710244Y2 (US06566495-20030520-M00011.png)

Also Published As

Publication number Publication date
JPH0710244Y2 (ja) 1995-03-08

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