JPH02110666U - - Google Patents
Info
- Publication number
- JPH02110666U JPH02110666U JP1926289U JP1926289U JPH02110666U JP H02110666 U JPH02110666 U JP H02110666U JP 1926289 U JP1926289 U JP 1926289U JP 1926289 U JP1926289 U JP 1926289U JP H02110666 U JPH02110666 U JP H02110666U
- Authority
- JP
- Japan
- Prior art keywords
- retaining ring
- evaporation source
- vacuum
- notches
- tongue piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 3
- 230000008020 evaporation Effects 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1926289U JPH0527488Y2 (cs) | 1989-02-20 | 1989-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1926289U JPH0527488Y2 (cs) | 1989-02-20 | 1989-02-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02110666U true JPH02110666U (cs) | 1990-09-04 |
| JPH0527488Y2 JPH0527488Y2 (cs) | 1993-07-13 |
Family
ID=31234616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1926289U Expired - Lifetime JPH0527488Y2 (cs) | 1989-02-20 | 1989-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527488Y2 (cs) |
-
1989
- 1989-02-20 JP JP1926289U patent/JPH0527488Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527488Y2 (cs) | 1993-07-13 |