JPH02110332U - - Google Patents

Info

Publication number
JPH02110332U
JPH02110332U JP1936889U JP1936889U JPH02110332U JP H02110332 U JPH02110332 U JP H02110332U JP 1936889 U JP1936889 U JP 1936889U JP 1936889 U JP1936889 U JP 1936889U JP H02110332 U JPH02110332 U JP H02110332U
Authority
JP
Japan
Prior art keywords
chamber
oxygen plasma
plasma gas
holding groove
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1936889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1936889U priority Critical patent/JPH02110332U/ja
Publication of JPH02110332U publication Critical patent/JPH02110332U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1936889U 1989-02-20 1989-02-20 Pending JPH02110332U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1936889U JPH02110332U (US07923587-20110412-C00022.png) 1989-02-20 1989-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1936889U JPH02110332U (US07923587-20110412-C00022.png) 1989-02-20 1989-02-20

Publications (1)

Publication Number Publication Date
JPH02110332U true JPH02110332U (US07923587-20110412-C00022.png) 1990-09-04

Family

ID=31234817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1936889U Pending JPH02110332U (US07923587-20110412-C00022.png) 1989-02-20 1989-02-20

Country Status (1)

Country Link
JP (1) JPH02110332U (US07923587-20110412-C00022.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460567A (en) * 1977-10-24 1979-05-16 Hitachi Ltd Plasma processor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5460567A (en) * 1977-10-24 1979-05-16 Hitachi Ltd Plasma processor

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