JPH02110271U - - Google Patents
Info
- Publication number
- JPH02110271U JPH02110271U JP1784789U JP1784789U JPH02110271U JP H02110271 U JPH02110271 U JP H02110271U JP 1784789 U JP1784789 U JP 1784789U JP 1784789 U JP1784789 U JP 1784789U JP H02110271 U JPH02110271 U JP H02110271U
- Authority
- JP
- Japan
- Prior art keywords
- small
- sized refrigerator
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図及び第２図は従来のクライオポンプの断
面図、第３図は超音波モーターの断面図、第４図
は本考案の実施例の断面図である。
２……小型冷凍機、９……超音波モーター。
1 and 2 are sectional views of a conventional cryopump, FIG. 3 is a sectional view of an ultrasonic motor, and FIG. 4 is a sectional view of an embodiment of the present invention. 2...Small refrigerator, 9...Ultrasonic motor.
Claims (1)
於いて、該小型冷凍機の駆動用モーターとして超
音波モーターを用いることを特徴とするクライオ
ポンプ。 A cryopump cooled by a small-sized refrigerator, characterized in that an ultrasonic motor is used as a drive motor for the small-sized refrigerator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1784789U JPH02110271U (en) | 1989-02-20 | 1989-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1784789U JPH02110271U (en) | 1989-02-20 | 1989-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02110271U true JPH02110271U (en) | 1990-09-04 |
Family
ID=31231985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1784789U Pending JPH02110271U (en) | 1989-02-20 | 1989-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02110271U (en) |
-
1989
- 1989-02-20 JP JP1784789U patent/JPH02110271U/ja active Pending