JPH02108728U - - Google Patents

Info

Publication number
JPH02108728U
JPH02108728U JP1557189U JP1557189U JPH02108728U JP H02108728 U JPH02108728 U JP H02108728U JP 1557189 U JP1557189 U JP 1557189U JP 1557189 U JP1557189 U JP 1557189U JP H02108728 U JPH02108728 U JP H02108728U
Authority
JP
Japan
Prior art keywords
chamber
light source
ultra
high vacuum
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1557189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1557189U priority Critical patent/JPH02108728U/ja
Publication of JPH02108728U publication Critical patent/JPH02108728U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1557189U 1989-02-13 1989-02-13 Pending JPH02108728U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1557189U JPH02108728U (OSRAM) 1989-02-13 1989-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1557189U JPH02108728U (OSRAM) 1989-02-13 1989-02-13

Publications (1)

Publication Number Publication Date
JPH02108728U true JPH02108728U (OSRAM) 1990-08-29

Family

ID=31227734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1557189U Pending JPH02108728U (OSRAM) 1989-02-13 1989-02-13

Country Status (1)

Country Link
JP (1) JPH02108728U (OSRAM)

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