JPH02108712U - - Google Patents
Info
- Publication number
- JPH02108712U JPH02108712U JP1752189U JP1752189U JPH02108712U JP H02108712 U JPH02108712 U JP H02108712U JP 1752189 U JP1752189 U JP 1752189U JP 1752189 U JP1752189 U JP 1752189U JP H02108712 U JPH02108712 U JP H02108712U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- air
- air filter
- clean
- ceiling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000011109 contamination Methods 0.000 claims 1
- 239000000356 contaminant Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Materials (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1752189U JPH02108712U (fr) | 1989-02-17 | 1989-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1752189U JPH02108712U (fr) | 1989-02-17 | 1989-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108712U true JPH02108712U (fr) | 1990-08-29 |
Family
ID=31231378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1752189U Pending JPH02108712U (fr) | 1989-02-17 | 1989-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108712U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997004851A1 (fr) * | 1995-07-27 | 1997-02-13 | Taisei Corporation | Filtre a air, son procede d'elaboration, traitement de locaux et de salles blanches, et procede de fabrication de materiaux pour filtres |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS501554B1 (fr) * | 1969-09-30 | 1975-01-18 | ||
| JPS62244418A (ja) * | 1986-04-18 | 1987-10-24 | Hitachi Ltd | エアフイルタ |
| JPS63209722A (ja) * | 1987-02-25 | 1988-08-31 | Hitachi Ltd | 薬品処理装置 |
-
1989
- 1989-02-17 JP JP1752189U patent/JPH02108712U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS501554B1 (fr) * | 1969-09-30 | 1975-01-18 | ||
| JPS62244418A (ja) * | 1986-04-18 | 1987-10-24 | Hitachi Ltd | エアフイルタ |
| JPS63209722A (ja) * | 1987-02-25 | 1988-08-31 | Hitachi Ltd | 薬品処理装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997004851A1 (fr) * | 1995-07-27 | 1997-02-13 | Taisei Corporation | Filtre a air, son procede d'elaboration, traitement de locaux et de salles blanches, et procede de fabrication de materiaux pour filtres |
| US5997598A (en) * | 1995-07-27 | 1999-12-07 | Taisei Corporation | Air filter for clean room |
| US6106586A (en) * | 1995-07-27 | 2000-08-22 | Taisei Corporation | Air filter for clean room |
| US6293982B1 (en) | 1995-07-27 | 2001-09-25 | Taisei Corporation | Air filter, local facility, and clean room |