JPH02108355U - - Google Patents

Info

Publication number
JPH02108355U
JPH02108355U JP1989017082U JP1708289U JPH02108355U JP H02108355 U JPH02108355 U JP H02108355U JP 1989017082 U JP1989017082 U JP 1989017082U JP 1708289 U JP1708289 U JP 1708289U JP H02108355 U JPH02108355 U JP H02108355U
Authority
JP
Japan
Prior art keywords
shim
shims
ceramic actuator
thickness
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989017082U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989017082U priority Critical patent/JPH02108355U/ja
Publication of JPH02108355U publication Critical patent/JPH02108355U/ja
Pending legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1989017082U 1989-02-16 1989-02-16 Pending JPH02108355U (US20070244113A1-20071018-C00087.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989017082U JPH02108355U (US20070244113A1-20071018-C00087.png) 1989-02-16 1989-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989017082U JPH02108355U (US20070244113A1-20071018-C00087.png) 1989-02-16 1989-02-16

Publications (1)

Publication Number Publication Date
JPH02108355U true JPH02108355U (US20070244113A1-20071018-C00087.png) 1990-08-29

Family

ID=31230567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989017082U Pending JPH02108355U (US20070244113A1-20071018-C00087.png) 1989-02-16 1989-02-16

Country Status (1)

Country Link
JP (1) JPH02108355U (US20070244113A1-20071018-C00087.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006346830A (ja) * 2005-06-17 2006-12-28 Toshiba Corp マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ
WO2015083589A1 (ja) * 2013-12-06 2015-06-11 株式会社 村田製作所 多連アクチュエータ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006346830A (ja) * 2005-06-17 2006-12-28 Toshiba Corp マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ
JP4580826B2 (ja) * 2005-06-17 2010-11-17 株式会社東芝 マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ
WO2015083589A1 (ja) * 2013-12-06 2015-06-11 株式会社 村田製作所 多連アクチュエータ

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