JPH02108330U - - Google Patents
Info
- Publication number
- JPH02108330U JPH02108330U JP1580389U JP1580389U JPH02108330U JP H02108330 U JPH02108330 U JP H02108330U JP 1580389 U JP1580389 U JP 1580389U JP 1580389 U JP1580389 U JP 1580389U JP H02108330 U JPH02108330 U JP H02108330U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- substrate
- inlet
- coating
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1580389U JPH02108330U (en, 2012) | 1989-02-15 | 1989-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1580389U JPH02108330U (en, 2012) | 1989-02-15 | 1989-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108330U true JPH02108330U (en, 2012) | 1990-08-29 |
Family
ID=31228177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1580389U Pending JPH02108330U (en, 2012) | 1989-02-15 | 1989-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108330U (en, 2012) |
-
1989
- 1989-02-15 JP JP1580389U patent/JPH02108330U/ja active Pending