JPH02108296U - - Google Patents

Info

Publication number

JPH02108296U

JPH02108296U JP1684589U JP1684589U JPH02108296U JP H02108296 U JPH02108296 U JP H02108296U JP 1684589 U JP1684589 U JP 1684589U JP 1684589 U JP1684589 U JP 1684589U JP H02108296 U JPH02108296 U JP H02108296U

Authority

JP

Japan

Prior art keywords

thin film

film

insulating layer

back electrode

insulating

Prior art date

1989-02-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims description 5
• 239000010408 film Substances 0.000 claims description 4
• 239000011521 glass Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 2
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
• 230000002950 deficient Effects 0.000 claims 1
• 229910052760 oxygen Inorganic materials 0.000 claims 1
• 239000001301 oxygen Substances 0.000 claims 1
• BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 1