JPH02107013U - - Google Patents

Info

Publication number
JPH02107013U
JPH02107013U JP1524789U JP1524789U JPH02107013U JP H02107013 U JPH02107013 U JP H02107013U JP 1524789 U JP1524789 U JP 1524789U JP 1524789 U JP1524789 U JP 1524789U JP H02107013 U JPH02107013 U JP H02107013U
Authority
JP
Japan
Prior art keywords
output
reference signal
phase difference
detection element
position detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1524789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0641127Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1524789U priority Critical patent/JPH0641127Y2/ja
Publication of JPH02107013U publication Critical patent/JPH02107013U/ja
Application granted granted Critical
Publication of JPH0641127Y2 publication Critical patent/JPH0641127Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP1524789U 1989-02-10 1989-02-10 変位計 Expired - Lifetime JPH0641127Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1524789U JPH0641127Y2 (ja) 1989-02-10 1989-02-10 変位計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1524789U JPH0641127Y2 (ja) 1989-02-10 1989-02-10 変位計

Publications (2)

Publication Number Publication Date
JPH02107013U true JPH02107013U (enrdf_load_stackoverflow) 1990-08-24
JPH0641127Y2 JPH0641127Y2 (ja) 1994-10-26

Family

ID=31227134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1524789U Expired - Lifetime JPH0641127Y2 (ja) 1989-02-10 1989-02-10 変位計

Country Status (1)

Country Link
JP (1) JPH0641127Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0641127Y2 (ja) 1994-10-26

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