JPH02106821U - - Google Patents

Info

Publication number
JPH02106821U
JPH02106821U JP1466889U JP1466889U JPH02106821U JP H02106821 U JPH02106821 U JP H02106821U JP 1466889 U JP1466889 U JP 1466889U JP 1466889 U JP1466889 U JP 1466889U JP H02106821 U JPH02106821 U JP H02106821U
Authority
JP
Japan
Prior art keywords
wafer
chamfers
semiconductor devices
chamfered
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1466889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1466889U priority Critical patent/JPH02106821U/ja
Publication of JPH02106821U publication Critical patent/JPH02106821U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1466889U 1989-02-10 1989-02-10 Pending JPH02106821U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1466889U JPH02106821U (zh) 1989-02-10 1989-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1466889U JPH02106821U (zh) 1989-02-10 1989-02-10

Publications (1)

Publication Number Publication Date
JPH02106821U true JPH02106821U (zh) 1990-08-24

Family

ID=31226076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1466889U Pending JPH02106821U (zh) 1989-02-10 1989-02-10

Country Status (1)

Country Link
JP (1) JPH02106821U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008136423A1 (ja) * 2007-04-27 2008-11-13 Shibaura Mechatronics Corporation 半導体ウェーハ処理装置、基準角度位置検出方法及び半導体ウェーハ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008136423A1 (ja) * 2007-04-27 2008-11-13 Shibaura Mechatronics Corporation 半導体ウェーハ処理装置、基準角度位置検出方法及び半導体ウェーハ

Similar Documents

Publication Publication Date Title
JPS6088535U (ja) 半導体ウエハ
JPH02106821U (zh)
JPS6196535U (zh)
JPH0313741U (zh)
JPH01107126U (zh)
JPS6373954U (zh)
JPH0233126U (zh)
JPS62110854U (zh)
JPS6333633U (zh)
JPS6370140U (zh)
JPH02105441U (zh)
JPH03110306U (zh)
JPH0231154U (zh)
JPH0281536U (zh)
JPH029438U (zh)
JPH01116444U (zh)
JPS6424824U (zh)
JPS63118291U (zh)
JPS6151735U (zh)
JPH0289823U (zh)
JPS62151747U (zh)
JPH01161334U (zh)
JPH01171035U (zh)
JPH0331088U (zh)
JPS62193731U (zh)