JPH02105597U - - Google Patents

Info

Publication number
JPH02105597U
JPH02105597U JP1303589U JP1303589U JPH02105597U JP H02105597 U JPH02105597 U JP H02105597U JP 1303589 U JP1303589 U JP 1303589U JP 1303589 U JP1303589 U JP 1303589U JP H02105597 U JPH02105597 U JP H02105597U
Authority
JP
Japan
Prior art keywords
damper
vacuum pump
bearing
rotating shaft
corrosion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1303589U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1303589U priority Critical patent/JPH02105597U/ja
Publication of JPH02105597U publication Critical patent/JPH02105597U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案に係わる真空ポンプの一実施例
を示す縦断側面図、第2図乃至第4図は他の各実
施例を示す縦断側面図、第5図は真空ポンプの全
体を示す縦断側面図、第6図は従来の真空ポンプ
を示す縦断側面図である。 1……回転軸、2……軸受、3a,3b,4,
3a,3b,7a,7b、または3a,3b,7
,8,9……ダンパ、6または6a,6b……ベ
ローズ。
FIG. 1 is a longitudinal side view showing one embodiment of the vacuum pump according to the present invention, FIGS. 2 to 4 are longitudinal side views showing other embodiments, and FIG. 5 is a longitudinal section showing the entire vacuum pump. A side view, FIG. 6 is a vertical side view showing a conventional vacuum pump. 1...Rotating shaft, 2...Bearing, 3a, 3b, 4,
3a, 3b, 7a, 7b, or 3a, 3b, 7
, 8, 9... damper, 6 or 6a, 6b... bellows.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 高速回転する回転軸を軸受を介して支持するダ
ンパを具えた真空ポンプにおいて、前記緩衝機能
を有するダンパを耐食性材料よりなるベローズに
より取り囲んだことを特徴とする真空ポンプ。
1. A vacuum pump equipped with a damper that supports a rotating shaft rotating at high speed via a bearing, characterized in that the damper having a buffering function is surrounded by a bellows made of a corrosion-resistant material.
JP1303589U 1989-02-08 1989-02-08 Pending JPH02105597U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1303589U JPH02105597U (en) 1989-02-08 1989-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1303589U JPH02105597U (en) 1989-02-08 1989-02-08

Publications (1)

Publication Number Publication Date
JPH02105597U true JPH02105597U (en) 1990-08-22

Family

ID=31223004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1303589U Pending JPH02105597U (en) 1989-02-08 1989-02-08

Country Status (1)

Country Link
JP (1) JPH02105597U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993995A (en) * 1982-10-23 1984-05-30 アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− Pump
JPS63246498A (en) * 1987-03-31 1988-10-13 Toshiba Corp Sealing device for compressor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993995A (en) * 1982-10-23 1984-05-30 アルツ−ル・フアイフエル・ヴア−クウムテクニツク・ヴエツツラ−・ゲ−エムベ−ハ− Pump
JPS63246498A (en) * 1987-03-31 1988-10-13 Toshiba Corp Sealing device for compressor

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