JPH02105305A - Double azimuth magnetic head - Google Patents

Abstract

PURPOSE:To ensure the stable run of a tape by forming the 1st and 2nd head elements in one body on a nonmagnetic substrate. CONSTITUTION:A nonmagnetic thin film 32 containing Ti, etc., covers a thick film part 32a of 25mum thick and a thin film part 32b of 2mum thick on a nonmagnetic substrate 31 of about 0.3mm thick. A 1st head element 45 containing a 1st action gap 35 having an azimuth angle -alpha is formed on the part 32a at a position between 1st and 2nd magnetic cores 33 and 34 made of a ferromagnetic metallic thin film of 'Sendust(R)', etc. While a 2nd head element 46 containing a 2nd action gap 38 having an azimuth angle +alpha is formed on the part 32b at a position between 3rd and 4th magnetic cores 36 and 37 made of a ferromagnetic metallic thin film of 'Sendust(R)', etc. A wind ing hole 39 is formed over the substrate 31, the part 32a, and the core 33. The upper end of the hole 39 prescribes the depth of gap 35 in the area of the core 33. Thus the position error is prevented between both gaps 35 and 38.

Description

DETAILED DESCRIPTION OF THE INVENTION (A) Field of Industrial Application The present invention relates to a double azimuth magnetic head in which two gaps have a predetermined distance and are inclined in opposite directions.

(b) Conventional technology In recent years, VTRs (video tape recorders) have been
In order to prevent deterioration of image quality during special playback such as still playback, Japanese Patent Application Laid-open No. 60-70511 (Gl I
A double azimuth magnetic head such as that disclosed in B5153) is used. FIG. 1O is a perspective view of essential parts of a conventional double azimuth magnetic head, and FIG. 11 is a view of the magnetic head viewed from the tape sliding surface side.

In the figure, (1) and (2) are the head chips attached to the helad base (3), respectively, and the respective operating gaps (4) and (5)
have opposite azimuth angles of +α and −α. The Herad chips (1) (2 units) each include main cores (6) (7) made of sendust, and reinforcing cores (8) (9) (10) (2) that sandwich the main cores (6) (7). 11). In addition, (12) and (13) are winding grooves, (14) and (15)
(1,6)(17) are windings.

However, in the double azimuth magnetic head having the above structure, each head chip type is independently attached to the head base (3), so the head chip size is
It is difficult to make the distance e between the two wires as specified, and it is also difficult to adjust the distance e between the
A step difference occurred in the amount of protrusion compared to 3), which hindered stable running of the tape and caused a decrease in reliability.

Double azimuth magnetic heads are also used in high-quality VTRs, where one head chip records and plays back 172 fields (1 segment) of video signals, and the other head chip records and plays back the remaining 172 fields of video signals. .

As shown in FIG. 12, this high-quality VTR has first and second double azimuth magnetic heads (19) and (20) mounted at positions 180° opposed to each other on a rotating cylinder (18). The first and second double azimuth magnetic heads (19) (
20) respectively, the gap distance 2 between the head chips is 3.
, 979 μm, head base (21) (22
) The first and second head tinops (23) (24
)(25)(26). Also, the first and second magnetic heads (19) of the first double azimuth magnetic head (19)
As shown in FIG. 14, there is a track step difference t (t=23 μm) between 23 and 24. Similarly, there is a track step difference t between the first and second hard disk chips (25) and (26) of the second double azimuth magnetic head (20).

In this high-quality VTR, the rotating cylinder (18) is 540
Since it rotates at 0 rpm, three times the normal speed, and records four tracks per rotation, video and audio signals are recorded on 12 signal tracks per frame, increasing the resolution. In this track scanning, as shown in FIG.
), and when this scanning is completed, the second double azimuth magnetic head (2
The first and second head chips (25, 26) of 0) simultaneously scan the third and fourth tracks (29, 30).

However, in such a double azimuth magnetic head for high-quality VTRs, if the distance 2 between the head chips or the track step t becomes out of order, or if there is a step in the protrusion amount of the head chips, special playback may occur. In addition, basic performance such as compatibility in normal playback is degraded.

(c) Problems to be Solved by the Invention The present invention has been made in view of the drawbacks of the above-mentioned conventional examples.
An object of the present invention is to provide a double azimuth magnetic head that can prevent the running performance of a recording medium from deteriorating and can set the positional relationship between a first working gap and a second working gap with high precision. It is.

(d) Means for Solving the Problems The double azimuth magnetic head of the present invention has a non-magnetic thin film having a thick film part and a thin film part deposited on a non-magnetic substrate, and a first film on the thick film part. A first head element having an operating gap is attached, and a second head element having a second operating gap having an azimuth angle different from the first operating gap is attached on the thin film portion. do.

Furthermore, the double azimuth magnetic head of the present invention is characterized in that the difference in film thickness between the thick film portion and the thin film portion is equal to the track step difference between the first working gap and the second working gap.

(E) Effect According to the above structure, since the first head element and the second head element are integrally formed on the non-magnetic substrate, the first head element and the second head element There is no step difference in the amount of protrusion toward the medium side. Furthermore, it is possible to suppress the deviation in relative position between the first working gap and the second working gap, and in particular, the track step difference between the first working gap and the second working gap can be reduced by the thickness of the non-magnetic thin film. The difference in film thickness between the film portion and the thin film portion allows highly accurate setting.

(F) Embodiment Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view showing the external appearance of the double azimuth magnetic head of this embodiment, and FIG. 2 is a view of the magnetic head viewed from the tape sliding surface side.

In FIG. 1, (31) is a nonmagnetic substrate with a thickness of about Q, 3 mm, and a nonmagnetic thin film (32) made of Ti or the like is deposited on the nonmagnetic substrate (31). The non-magnetic thin film (32) has a thick film part (32a) with a thickness of 25 μm and a thick film part (32a) with a thickness of 21 μm.
tm thin film portion (32b). The thick film portion (32
a) -, ), a first working gap (35) having an azimuth angle of -α between the first and second magnetic cores (33, 34) made of a ferromagnetic metal thin film such as Sendust; One head element (45) is formed. The thin film portion (32b), 1- has a second working gap (38) having an azimuth angle of ten α between the third and fourth magnetic cores (36, 37) made of a ferromagnetic metal thin film such as sendust. A second head element (46) is formed. (
39) is a wire hole formed across the non-magnetic substrate (31), the thick film portion (32a) of the non-magnetic thin film (32), and the first magnetic core (33); ) of said first
The upper end in the area of the magnetic core (33) defines the gear depth of said first working gap (35). Also, (40)
are the thin film portions of the nonmagnetic substrate (31) and the nonmagnetic thin film (32).
32b) and a third magnetic core (36), and the upper end of the winding hole (40) in the third magnetic core (36) region is the second working gap. (3
8) Specify the gap depth. As shown in FIG. 2, the gap distance between the first working gap (35) and the second working gap (38) is l, and the track level difference is t.
The step t between the gears is the non-magnetic thin film (32
) is equal to the difference in film thickness between the thick film portion (32a) and the thin film portion (32b).Next, a method for manufacturing the double azimuth magnetic head will be described.

First, as shown in Fig. 3, through holes (350 μm on the long side, 150 μm on the short side) (44a) (41b) are made to become the winding holes.
) A nonmagnetic thin film (32) of Ti or the like is deposited on a nonmagnetic substrate (31) with a thickness of about 0.3 μm by vapor deposition or sputtering. The thickness of the non-magnetic thin film (32) is larger than the desired track width (20 μm in this example).

Next, one of the through holes (
41b) is formed by etching such as ion milling, and as shown in FIG. It is divided into a thick film part (32a) and a thin film part (32b). Note that the thick film part (32a) and the thin film part (32b
) is the desired track step difference (23 in the example).
The etching amount is adjusted so that It m ).

Next, as shown in FIG. 5, the non-magnetic thin film (32) is
a first magnetic thin film (42) with a thickness corresponding to the track width;
is deposited by sputtering or the like. The first magnetic thin film (42) is a 2-7 μm thick ferromagnetic metal thin film made of sendust, Co-based amorphous alloy, etc.
It has a laminated structure insulated by a non-magnetic thin film approximately 0.1 μm thick.

Next, as shown in FIG. 6, the first magnetic thin film (42)
Among them, the portions on the bisexual side including the through holes (41a) and (41b) are removed by etching such as ion milling, and the second
A gap forming surface (43) is formed by forming a fourth magnetic core (34) (37), and then cutting the outer end surfaces of the second and fourth magnetic cores (34) (37) with a diamond cutting tool or the like. (44) is formed. The gap forming surfaces (43) and (44) are inclined by predetermined azimuth angles -α and +α (a=15° in the embodiment) with respect to the normal direction of the nonmagnetic substrate (31), respectively.

Next, on the gap forming surfaces (43) (44), SiO
A gap spacer of 0.2 to 0.3 μm thick is formed by sputtering or the like, and then the non-magnetic substrate (3
1) After depositing a second magnetic thin film over the entire upper area by sputtering or the like, the second and fourth magnetic cores (34) (37)
The excess second magnetic thin film deposited thereon is removed by etching or the like, and the first and third magnetic cores (3) are removed as shown in FIG.
3) Form (36). Like the first magnetic thin film (42), the second magnetic thin film has a laminated structure of a ferromagnetic metal thin film and a nonmagnetic thin film. (35) and (38) are first and second working gaps formed by the gap spacers. Thereafter, etching such as ion milling is performed around the through holes (41a) (41b) among the first, second, third, and fourth magnetic cores (33) (34) (36) (37) (7). to form the winding holes (39) and (40), and the first and second working gaps (35) and (38)
) defines the gap depth.

And finally, the first, second, third, and fourth magnetic cores (
33) A protective film (not shown) made of a non-magnetic material such as alumina with a thickness of 40 to 50 μm is deposited on (34) (36) (37) by high-speed sputtering, etc., and then the end surface on the tape sliding contact side is coated. The winding grooves (39) (40
) is wound to complete the double azimuth magnetic head of this embodiment shown in FIG.

In a double azimuth magnetic head such as a duplex, a first head element (normal) having a first working gap (35)
and a second head element (46) having a second working gap (38) are integrally formed on the same non-magnetic substrate (31), so that the tape of the first head element (45) The amount of protrusion between the sliding contact portion and the tape sliding contact portion of the second head element (46) is uniform, and the running performance of the tape is not deteriorated. Furthermore, in the double azimuth magnetic head having the above structure, the distance between the first and second working gaps (35) and (38)! is defined by the etching process shown in FIG. 6, and the track step difference t between the first and second working gaps (35) and (38) is defined by the etching amount shown in FIG. The distance between the working gaps (35) and (38)! And the track step difference t can be set with high precision. Therefore, when this magnetic head is used in a high-quality VTR device, it is possible to prevent deterioration in image quality and compatibility during normal playback.

FIG. 8 is a perspective view of a double azimuth magnetic head according to another embodiment, in which the same parts as in FIG. 1 are given the same reference numerals. FIG. 9 is a diagram showing the main parts of the tape sliding surface.

In the double azimuth magnetic head of this embodiment, the second magnetic core (34) and the fourth magnetic core (37) have a stepped portion (47).
Since the first head element (45) and the second head element (46) are separated from each other, Talostalk between the first head element (45) and the second head element (46) is prevented. This magnetic head is manufactured in the step shown in FIG.
, after forming the third magnetic core (33) (36), 1fi
The magnetic thin film adhering to the stepped portion (47) is removed by etching such as ion milling to form the non-magnetic groove III (
32) is exposed and then a protective film is applied.

(G) Effects of the Invention According to the present invention, it is possible to provide a double azimuth magnetic head that stabilizes tape running and prevents device misalignment between the first working gap and the second working gap.

[Brief explanation of the drawing]

1 to 9 relate to the present invention; FIG. 1 is a perspective view showing the external appearance of a double azimuth magnetic head, FIG. 2 is a view showing the tape sliding surface of the double azimuth magnetic head, FIGS. 4, 5, 6, and 7 are diagrams showing a method of manufacturing a double azimuth magnetic head, respectively. FIG. 8 is a perspective view showing the external appearance of a double azimuth magnetic head of another embodiment, and FIG. 9. FIG. 3 is a diagram showing a main part of a tape sliding surface of a double azimuth magnetic head according to another embodiment. Fig. 10 is a perspective view of the main parts of a conventional double azimuth magnetic head, Fig. 11 is a view of the L double azimuth magnetic head viewed from the tape sliding surface side, Fig. 12
13 is a diagram showing a rotating cylinder, FIG. 13 is a diagram showing a scanning track, and FIG. 14 is a diagram showing a step difference in a Herad tip.

Claims (2)

[Claims] (1) A nonmagnetic thin film having a thick film part and a thin film part is deposited on a nonmagnetic substrate, a first head element having a first working gap is deposited on the thick film part, and the thin film 1. A double azimuth magnetic head, comprising: a second head element having a second working gap having an azimuth angle different from the first working gap; (2) The double azimuth according to claim (1), wherein the difference in film thickness between the thick film part and the thin film part is equal to the track step difference between the first working gap and the second working gap. magnetic head.