JPH02105171U - - Google Patents
Info
- Publication number
- JPH02105171U JPH02105171U JP1361089U JP1361089U JPH02105171U JP H02105171 U JPH02105171 U JP H02105171U JP 1361089 U JP1361089 U JP 1361089U JP 1361089 U JP1361089 U JP 1361089U JP H02105171 U JPH02105171 U JP H02105171U
- Authority
- JP
- Japan
- Prior art keywords
- cup
- conductor
- outer circumference
- shield body
- hitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図はこの考案の一実施例によるフアラデー
カツプモニタの要部を示す一部切欠断面図、第２
図は第１図の正面図、第３図は従来のフアラデー
カツプモニタの一例を示す要部断面図である。
図において、３は金属カツプ、４はシールド体
である。なお、各図中、同一符号は同一又は相当
部分を示す。
FIG. 1 is a partially cutaway sectional view showing the main parts of a Faraday cup monitor according to an embodiment of this invention;
The figure is a front view of FIG. 1, and FIG. 3 is a sectional view of a main part showing an example of a conventional Faraday cup monitor. In the figure, 3 is a metal cup and 4 is a shield body. In each figure, the same reference numerals indicate the same or equivalent parts.
Claims (1)
プと、このカツプの外周部を覆うように設けられ
、かつ前記カツプに対して電気的に絶縁され、前
記カツプの外周部に荷電粒子が当たるのを防止す
る導体からなるシールド体とを備えたことを特徴
とするフアラデーカツプモニタ。 A cup made of a conductor into which the charged particle beam is incident; and a cup provided to cover the outer circumference of the cup and electrically insulated from the cup to prevent charged particles from hitting the outer circumference of the cup. A far day cup monitor characterized by comprising a shield body made of a conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989013610U JPH0755512Y2 (en) | 1989-02-09 | 1989-02-09 | Faraday cup monitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989013610U JPH0755512Y2 (en) | 1989-02-09 | 1989-02-09 | Faraday cup monitor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02105171U true JPH02105171U (en) | 1990-08-21 |
| JPH0755512Y2 JPH0755512Y2 (en) | 1995-12-20 |
Family
ID=31224062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989013610U Expired - Lifetime JPH0755512Y2 (en) | 1989-02-09 | 1989-02-09 | Faraday cup monitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0755512Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5679275A (en) * | 1979-12-03 | 1981-06-29 | Fujitsu Ltd | Measuring method for electron beam diameter |
| JPS592356A (en) * | 1982-06-28 | 1984-01-07 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1989
- 1989-02-09 JP JP1989013610U patent/JPH0755512Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5679275A (en) * | 1979-12-03 | 1981-06-29 | Fujitsu Ltd | Measuring method for electron beam diameter |
| JPS592356A (en) * | 1982-06-28 | 1984-01-07 | Fujitsu Ltd | Manufacture of semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0755512Y2 (en) | 1995-12-20 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |