JPH02105152U - - Google Patents

Info

Publication number
JPH02105152U
JPH02105152U JP1326489U JP1326489U JPH02105152U JP H02105152 U JPH02105152 U JP H02105152U JP 1326489 U JP1326489 U JP 1326489U JP 1326489 U JP1326489 U JP 1326489U JP H02105152 U JPH02105152 U JP H02105152U
Authority
JP
Japan
Prior art keywords
light source
slit
source unit
converts
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1326489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1326489U priority Critical patent/JPH02105152U/ja
Publication of JPH02105152U publication Critical patent/JPH02105152U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
JP1326489U 1989-02-07 1989-02-07 Pending JPH02105152U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1326489U JPH02105152U (fr) 1989-02-07 1989-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1326489U JPH02105152U (fr) 1989-02-07 1989-02-07

Publications (1)

Publication Number Publication Date
JPH02105152U true JPH02105152U (fr) 1990-08-21

Family

ID=31223423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1326489U Pending JPH02105152U (fr) 1989-02-07 1989-02-07

Country Status (1)

Country Link
JP (1) JPH02105152U (fr)

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