JPH02104633U - - Google Patents

Info

Publication number
JPH02104633U
JPH02104633U JP1312189U JP1312189U JPH02104633U JP H02104633 U JPH02104633 U JP H02104633U JP 1312189 U JP1312189 U JP 1312189U JP 1312189 U JP1312189 U JP 1312189U JP H02104633 U JPH02104633 U JP H02104633U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
nozzles
drying
air gas
item
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1312189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1312189U priority Critical patent/JPH02104633U/ja
Publication of JPH02104633U publication Critical patent/JPH02104633U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1312189U 1989-02-08 1989-02-08 Pending JPH02104633U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1312189U JPH02104633U (enrdf_load_stackoverflow) 1989-02-08 1989-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1312189U JPH02104633U (enrdf_load_stackoverflow) 1989-02-08 1989-02-08

Publications (1)

Publication Number Publication Date
JPH02104633U true JPH02104633U (enrdf_load_stackoverflow) 1990-08-20

Family

ID=31223169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1312189U Pending JPH02104633U (enrdf_load_stackoverflow) 1989-02-08 1989-02-08

Country Status (1)

Country Link
JP (1) JPH02104633U (enrdf_load_stackoverflow)

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