JPH02104559U - - Google Patents

Info

Publication number
JPH02104559U
JPH02104559U JP1343589U JP1343589U JPH02104559U JP H02104559 U JPH02104559 U JP H02104559U JP 1343589 U JP1343589 U JP 1343589U JP 1343589 U JP1343589 U JP 1343589U JP H02104559 U JPH02104559 U JP H02104559U
Authority
JP
Japan
Prior art keywords
cesium
target
reservoir
sputter
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1343589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530276Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1343589U priority Critical patent/JPH0530276Y2/ja
Publication of JPH02104559U publication Critical patent/JPH02104559U/ja
Application granted granted Critical
Publication of JPH0530276Y2 publication Critical patent/JPH0530276Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1343589U 1989-02-07 1989-02-07 Expired - Lifetime JPH0530276Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1343589U JPH0530276Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-07 1989-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1343589U JPH0530276Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-07 1989-02-07

Publications (2)

Publication Number Publication Date
JPH02104559U true JPH02104559U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-20
JPH0530276Y2 JPH0530276Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-03

Family

ID=31223741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1343589U Expired - Lifetime JPH0530276Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-02-07 1989-02-07

Country Status (1)

Country Link
JP (1) JPH0530276Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006259158A (ja) * 2005-03-16 2006-09-28 Canon Inc レンズ鏡筒および光学機器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006259158A (ja) * 2005-03-16 2006-09-28 Canon Inc レンズ鏡筒および光学機器

Also Published As

Publication number Publication date
JPH0530276Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-03

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