JPH0210391Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a clean valve that prevents foreign matter from entering a fluid and improves its lifespan.

[Conventional technology]

For example, in cleaning equipment and various processing equipment used in the manufacture of semiconductor devices, it is necessary to supply cleaning liquid and processing liquid to each device from a liquid tank. In this case, a valve is inserted into a part of the liquid supply pipe to control the supply of liquid to each device, and the valve is operated to control opening and closing of the supply pipe.

FIG. 4 shows the configuration of a conventional valve used for this type of application, and in the figure, 1 indicates a liquid supply pipe and 21 indicates a valve. This valve 21 is constructed by screwing a holder 22 onto the sleeve 2 of the supply pipe 1, inserting a lock nut 23 into the holder, supporting it with a stop cap 29 screwed onto the holder 22, and further attaching the valve shaft to the lock nut 23. 2
4 is inserted and screwed together. A handle 25 is integrally attached to the outer end of the valve shaft 24,
Further, a valve body 26 is connected to its inner end, and is positioned opposite to a valve seat 3 formed inside the supply pipe 1 . Further, rubber O-rings 27 and 28 are inserted between the sleeve 2 and the holder 22, and between the holder 22 and the push nut 23, respectively, for sealing. It contacts the circumferential surface of the shaft 24 to provide a seal with the valve shaft 24.

In this valve 21, when the handle 25 is rotated, the valve shaft 24 screwed into the push nut 23 is thereby screwed and moved in the axial direction, and when moved downward in the figure, the valve body 26 is moved. The supply pipe 1 can be closed by pressing the valve seat 3. Furthermore, the supply pipe 1 can be opened by rotating the handle 25 in the opposite direction.

However, in this valve structure, valve 2
1, the threaded portion of the valve shaft 24 and the push nut 23 is in frictional contact, so when the valve shaft 24 moves in the axial direction, this friction causes wear on the valve shaft 24 or the push nut 23. This abrasion powder mixes into the supply liquid and contaminates the liquid. Also,
In order to prevent damage to the valve due to over-tightening, the valve stem 24 is configured to rotate idly even if the valve is rotated excessively when closing the valve.
At this time, relative rotation occurs between the valve shaft 24 and the valve body 26, so that abrasion powder is generated due to wear, which causes liquid contamination. Furthermore, this valve 21
Since the valve shaft 24 is rotated, the friction with the O-ring 28 that is in contact with its circumferential surface also increases.
There is also the problem that the O-ring 28 is worn out and foreign matter is generated, and the life of the valve is shortened as well as the life of the O-ring.

[Purpose of invention]

The purpose of this invention is to reduce friction points inside the valve as much as possible to prevent the generation of foreign substances such as wear particles, and to create a clean valve that can extend the life of the valve by extending the life of the sealing material. Our goal is to provide the following.

[Summary of the idea]

In this invention, a holder and a push nut are sequentially attached to the sleeve of a pipe that allows fluid to flow through and is supplied, a sealing material is inserted between the holder and the push nut, and the valve shaft is moved axially to the push nut. A handle screwed into the holder is connected freely in the axial direction and integrally in the axial direction, and the inner end of the valve stem is connected to the inside of the supply pipe. A valve body that can come into contact with a valve seat formed in the above is integrally attached, and the sealing material is in liquid-tight contact with the circumferential surface of the valve shaft, and the sealing material is in direct contact with the valve shaft. It is characterized by being composed of a resin ring and a rubber O-ring that fits into a groove provided at the end of the resin ring and is pressed against the holder and the push nut in the axial direction. .

〔Example〕

FIG. 1 is a sectional view of one embodiment of the present invention, and 1
1 is a supply pipe for flowing and supplying a liquid such as a cleaning liquid;
1 is a clean valve of the present invention.

This valve 2 has a threaded portion 1 attached to a sleeve 2 that protrudes from a portion of the supply pipe 1 in a direction perpendicular to the length of the pipe.
It has a holder 12 which is screwed together at 2a, and a push nut 13 which is screwed into this holder 12 at a threaded part 13a,
A valve shaft 14 is inserted into the hollow interior of this push nut 13. This valve shaft 14 has a handle 15 connected to its outer end (upper end in the figure), and a valve body 16 integrally formed at its inner end (lower end in the figure). The handle 15 has a cylindrical container shape that covers a part of the holder 12, and has a threaded portion 15a formed on its inner peripheral surface screwed into a threaded portion 12b at the outer end of the holder 12. Further, the handle 15 is connected to the valve shaft 14 by a bolt 19, so that the two are free in the axial direction and integrally connected in the axial direction. Further, a valve holder 16a made of resin is integrally attached to the lower end surface of the valve body 16.

On the other hand, seal members 17 and 18 are inserted between the sleeve 2 and the holder 12 and between the holder 12 and the push nut 13, respectively. The former seal member 17 uses a resin O-ring similar to the conventional one, while the latter seal member 18 uses a ring whose details are shown in FIG. 2. That is,
This sealing member 18 is made of a resin ring 30 having a flat surface 31 at one end and a groove 32 at the other end.
and a rubber O-ring 33 that is fitted and supported within this groove 32, forming a single unit. Then, using two units of this, the flat surface 31
They are arranged so that they match each other. When inserted between the holder 12 and the push nut 13, each O-ring 33 is in contact with each end surface of the holder 12 and the push nut 13, and one side surface of the resin ring 30 is attached to the periphery of the valve shaft 14. It is designed to come into pressure contact with the surface.

According to the above configuration, when the handle 15 is rotated, the handle 15 is moved in the axial direction due to the threaded engagement between the threaded portion 15a and the threaded portion 12b, and the valve stem 14 is also moved in the axial direction. And valve stem 1
4 is axially moved downward in the figure, the valve holder 16a of the valve body 16 comes into contact with the opening edge of the valve seat 3 of the supply pipe 1, and the valve holder 16a seals the valve seat 3, causing the valve body 16 to close the supply pipe 1.
Close. Needless to say, when the valve stem 14 is moved upward, the valve body 16 separates from the valve seat 3, opening the supply pipe 1.

According to this valve action, even when the handle 15 is rotated, the valve stem 14 simply moves in the axial direction, and there is no friction point in the valve due to the screw as in the conventional case, so wear powder is generated. This prevents abrasion particles from entering the liquid. In addition, since the valve body 16 simply moves in the axial direction along with the valve stem 14 to open and close the valve seat 3, there is no friction between the valve holder 16a and the valve seat 3, and there is no friction between the valve holder 16a and the valve seat 3. never occurs.

On the other hand, when the valve stem 14 moves in the axial direction, friction occurs between the circumferential surface of the valve stem and the seal member 18, but as is clear from FIG. 30, generation of foreign matter such as abrasion powder can be significantly reduced compared to when the rubber is in contact with the rubber. In addition, in the sealing member 18 in which the resin ring 30 is brought into direct contact with the valve stem 14 in this way, even if the resin ring 30 is worn out, the holder 12 and the push nut 1 can be fixed as shown in FIG.
The O-ring 33 is deformed into a flat shape by the axial force of the resin ring 30, and this deformation force laterally widens both wings of the groove 32 of the resin ring 30, which improves the adhesion with the circumferential surface of the valve shaft 14, that is, the sealing performance. will not be lowered,
The life of the seal can be extended and the life of the valve 10 can be improved.

Here, the sealing member 18 may have a structure in which grooves are formed at both ends of the resin ring 30 and rubber O-rings are fitted and supported in each groove. In this case, one sealing member All you need to do is insert and place the . Furthermore, the present invention can be similarly applied to supply pipes through which not only liquid but also gas flows.

[Effect of idea]

As described above, the clean valve of the present invention can open and close the valve seat with the valve body by moving the valve stem only in the axial direction by rotating the handle. There are no frictional parts between the rollers and the like, so foreign matter such as abrasion powder does not get mixed into the supply fluid, and the supply fluid can be kept clean. In addition, since the sealing member is in contact with the valve stem through a resin ring, there is no generation of wear powder or other foreign matter caused by friction between the valve stem and the sealing member, and there is no possibility of foreign matter entering the supplied fluid. Contamination can be prevented. Furthermore, this seal member maintains contact with the valve shaft circumferential surface through cooperation between the resin ring and the rubber O-ring, so it maintains good sealing performance against wear and extends the life of the seal. At the same time, the life of the valve can be improved. Therefore, if the clean valve of the present invention is used, for example, in a processing liquid supply system of various semiconductor manufacturing equipment, it is effective in that a good semiconductor manufacturing process can be performed without the presence of foreign matter.

[Brief explanation of the drawing]

Fig. 1 is an overall sectional view of the clean valve of the present invention, Fig. 2 is a perspective view of the sealing member, Fig. 3 is a sectional view for explaining the function of this sealing member, and Fig. 4 is a sectional view of the clean valve of the present invention.
The figure is a sectional view of a conventional general valve. 1...Liquid supply pipe, 2...Sleeve, 3...Valve seat, 11...Clean valve, 12...Holder,
13... Push nut, 14... Valve stem, 15... Handle, 16... Valve body, 17, 18... Seal member, 19... Bolt, 30... Resin ring, 3
1...Flat surface, 32...Groove, 33...Rubber O-ring.

Claims (1)

[Scope of utility model registration request] A cylindrical holder and a push nut are sequentially attached to a sleeve protruding from a part of a pipe through which fluid flows and is supplied, and a sealing material is inserted between the holder and the push nut, and a sealing material is inserted between the holder and the push nut. A valve stem is inserted so as to be able to move axially, and a handle screwed into the holder is connected freely in the axial direction and integrally in the axial direction to the outer end of the valve stem, and a handle is attached to the inner end of the valve stem. A valve body that can come into contact with a valve seat formed inside the supply pipe is integrally attached, and the sealing material is brought into fluid-tight contact with the circumferential surface of the valve shaft, and further, this sealing material is attached to the valve seat formed inside the supply pipe. A resin ring that directly contacts the valve stem, and a rubber O-ring that is fitted and supported in a groove provided at the end of the resin ring and is pressed against the holder and the push nut in the axial direction. A clean valve characterized by the following configuration.