JPH02102721U - - Google Patents
Info
- Publication number
- JPH02102721U JPH02102721U JP1203689U JP1203689U JPH02102721U JP H02102721 U JPH02102721 U JP H02102721U JP 1203689 U JP1203689 U JP 1203689U JP 1203689 U JP1203689 U JP 1203689U JP H02102721 U JPH02102721 U JP H02102721U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- resist
- stage
- rails
- predetermined length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007723 transport mechanism Effects 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1203689U JPH0644091Y2 (ja) | 1989-02-02 | 1989-02-02 | レジスト膜形成装置のウェーハ搬送機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1203689U JPH0644091Y2 (ja) | 1989-02-02 | 1989-02-02 | レジスト膜形成装置のウェーハ搬送機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02102721U true JPH02102721U (Direct) | 1990-08-15 |
| JPH0644091Y2 JPH0644091Y2 (ja) | 1994-11-14 |
Family
ID=31221118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1203689U Expired - Lifetime JPH0644091Y2 (ja) | 1989-02-02 | 1989-02-02 | レジスト膜形成装置のウェーハ搬送機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644091Y2 (Direct) |
-
1989
- 1989-02-02 JP JP1203689U patent/JPH0644091Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644091Y2 (ja) | 1994-11-14 |
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