JPH02102433U - - Google Patents
Info
- Publication number
- JPH02102433U JPH02102433U JP1033889U JP1033889U JPH02102433U JP H02102433 U JPH02102433 U JP H02102433U JP 1033889 U JP1033889 U JP 1033889U JP 1033889 U JP1033889 U JP 1033889U JP H02102433 U JPH02102433 U JP H02102433U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- boron nitride
- crucible
- wall
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052582 BN Inorganic materials 0.000 claims description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 6
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1033889U JPH02102433U (nl) | 1989-01-30 | 1989-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1033889U JPH02102433U (nl) | 1989-01-30 | 1989-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02102433U true JPH02102433U (nl) | 1990-08-15 |
Family
ID=31217911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1033889U Pending JPH02102433U (nl) | 1989-01-30 | 1989-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02102433U (nl) |
-
1989
- 1989-01-30 JP JP1033889U patent/JPH02102433U/ja active Pending