JPH02101493U - - Google Patents

Info

Publication number

JPH02101493U

JPH02101493U JP971589U JP971589U JPH02101493U JP H02101493 U JPH02101493 U JP H02101493U JP 971589 U JP971589 U JP 971589U JP 971589 U JP971589 U JP 971589U JP H02101493 U JPH02101493 U JP H02101493U

Authority

JP

Japan

Prior art keywords

substrate

silicon carbide

heating

heating means

treatment apparatus

Prior art date

1989-01-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
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• 238000010438 heat treatment Methods 0.000 claims description 13
• 239000000758 substrate Substances 0.000 claims description 13
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 7
• 229910010271 silicon carbide Inorganic materials 0.000 claims description 7
• 238000004381 surface treatment Methods 0.000 claims description 4
• 230000002093 peripheral effect Effects 0.000 claims 1
• 238000005245 sintering Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 8
• 238000003763 carbonization Methods 0.000 description 1
• 238000006243 chemical reaction Methods 0.000 description 1
• 230000006698 induction Effects 0.000 description 1
• 239000012212 insulator Substances 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• 238000001953 recrystallisation Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 230000004584 weight gain Effects 0.000 description 1
• 235000019786 weight gain Nutrition 0.000 description 1