JPH02100843A - Surface plate for working magnetic head - Google Patents
Surface plate for working magnetic headInfo
- Publication number
- JPH02100843A JPH02100843A JP25302688A JP25302688A JPH02100843A JP H02100843 A JPH02100843 A JP H02100843A JP 25302688 A JP25302688 A JP 25302688A JP 25302688 A JP25302688 A JP 25302688A JP H02100843 A JPH02100843 A JP H02100843A
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- magnetic head
- mountain
- face
- curvature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 claims description 2
- 229910000978 Pb alloy Inorganic materials 0.000 claims description 2
- 239000006061 abrasive grain Substances 0.000 abstract description 10
- 125000006850 spacer group Chemical group 0.000 abstract description 4
- 238000005452 bending Methods 0.000 abstract description 3
- 238000007667 floating Methods 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 3
- 230000005489 elastic deformation Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 ferrous metals Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
- B23Q3/06—Work-clamping means
- B23Q3/062—Work-clamping means adapted for holding workpieces having a special form or being made from a special material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Jigs For Machine Tools (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、コンピュータの記憶装置として用いられる磁
気ヘッドの浮上面を加工する定盤に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a surface plate for processing the air bearing surface of a magnetic head used as a computer storage device.
磁気記録密度の増加に伴い、磁気ヘッドの浮上量は０．
３μｍと小さくなってきている。そのため、磁気ヘット
の浮上面および磁気ディスクの記録媒体表面は平滑に仕
上げなければならない。しかし、記憶装置を停止する場
合、ディスクの回転を停止してヘッドの浮上面をディス
ク上に接触させるため、両表面が平滑であると吸着を起
こし、ディスクを回転するモータの起動トルクでは、は
がずことが不能となる。With the increase in magnetic recording density, the flying height of the magnetic head has decreased to 0.
It is becoming smaller to 3 μm. Therefore, the air bearing surface of the magnetic head and the recording medium surface of the magnetic disk must be finished smooth. However, when stopping a storage device, the rotation of the disk is stopped and the flying surface of the head is brought into contact with the disk, so if both surfaces are smooth, adhesion will occur, and the starting torque of the motor that rotates the disk will not be enough. It becomes impossible to do anything.
この吸着を防ぐ手段として、第４図に示すように磁気ヘ
ッド２の浮上面１１をその長手方向（ヘッドの浮上方向
）に凸の曲率半径Ｒをもつようにｔ寸法だけ円筒面に仕
上げる加工（クラウン加工と称する）を行なう。この加
工に使用する定盤を供する治具として、実際６２−６１
０１９号記載の２面形成用磁気ヘッド加工用治具がある
。この治具１０は第３図に示すように中央のボルト８と
ナツト９とを締めることによって深さｈなる９面１とす
る。As a means to prevent this adsorption, as shown in FIG. 4, the air bearing surface 11 of the magnetic head 2 is finished into a cylindrical surface by dimension t so that it has a radius of curvature R that is convex in its longitudinal direction (flying direction of the head). (referred to as crown processing). Actually, 62-61 is used as a jig to provide the surface plate used for this processing.
There is a jig for processing a two-sided magnetic head described in No. 019. As shown in FIG. 3, this jig 10 has nine surfaces 1 having a depth h by tightening the central bolt 8 and nut 9.
こうしてｌの範囲で曲げた定盤上でラップ加工すること
によって定盤１の曲率半径Ｒが転写されて磁気ヘッド２
の浮上面に同じ曲率半径Ｒの円筒面を形成するクラウン
加工が行なわれている。By lapping the surface plate bent within the range l, the radius of curvature R of the surface plate 1 is transferred to the magnetic head 2.
A crown process is performed to form a cylindrical surface with the same radius of curvature R on the air bearing surface of the aircraft.
平滑な定盤に曲率半径大なる所期の円筒面をつけて、磁
気ヘッドの浮上面をランプ加工した場合、加工中にラッ
プ砥粒及び加工（ずの排出が充分に行なわれない。この
ため１、ラップ砥粒及び加工（ずが、定盤１と磁気ヘッ
ド２との間に入り、転動することによって磁気ヘッド２
の浮上面１１に傷がついて、平滑に仕上げることができ
ないという問題が生じる。When ramp machining is performed on the air bearing surface of a magnetic head by attaching a desired cylindrical surface with a large radius of curvature to a smooth surface plate, lap abrasive grains and machining particles are not sufficiently discharged during machining. 1. Lap abrasive grains and processing
A problem arises in that the air bearing surface 11 of the air bearing surface 11 is scratched and cannot be finished smoothly.
次に、ランプ荷重は非常に大きい場合や、樹脂等の軟か
い材料から成る定盤を用いてランプ加工した場合につい
て述べる。この様子を第５図に示す。この場合、矢印Ａ
方向に移動し、ラップ荷重をかけると、それによる定盤
面の弾性変形量が大きくなる。つまり、ワークのある部
分の曲率半径が、定盤１につけた円筒面の曲率半径に比
べて無視できない程度に大きくなる。このことにより磁
気ヘッド２の端部２ａの加工量が大きくなる、つまり、
ブレを生じることとなり、磁気ヘッドの浮上面を同曲率
の円筒面に仕上げることが困難になる。Next, we will discuss the case where the lamp load is very large or the case where the lamp is processed using a surface plate made of a soft material such as resin. This situation is shown in FIG. In this case, arrow A
When moving in the direction and applying a wrap load, the amount of elastic deformation of the surface plate surface increases. In other words, the radius of curvature of a certain part of the workpiece becomes so large that it cannot be ignored compared to the radius of curvature of the cylindrical surface attached to the surface plate 1. This increases the amount of processing on the end portion 2a of the magnetic head 2, that is,
As a result, it becomes difficult to finish the air bearing surface of the magnetic head into a cylindrical surface with the same curvature.
本発明の目的は、磁気ヘッドの浮上面を平滑かつ均一な
円筒面にクラウン加工することができる定盤を提供する
ことである。An object of the present invention is to provide a surface plate that can crown the air bearing surface of a magnetic head into a smooth and uniform cylindrical surface.
本発明は、凹に曲げた定盤面に多列の溝を設けてあり、
山の材質は非鉄金属であり、定盤を曲げる前の状態で、
多列の溝は定間隔をもった山の斜面が対向して交差する
ように並立している。そして、山の頂部は平坦面であっ
てこの平坦面のすべてが同一平面上にあることを特徴と
する磁気−・ラド加工用定盤である。In the present invention, multiple rows of grooves are provided on the concavely bent surface plate surface,
The material of the mountain is non-ferrous metal, and before bending the surface plate,
Multiple rows of grooves are lined up so that the mountain slopes at regular intervals intersect with each other. The top of the mountain is a flat surface, and all of the flat surfaces are on the same plane.
ここで、上記中の定盤に設ける山は、低硬度の非鉄金属
である錫合金または、銅合金、鉛合金のいずれか一つの
材質で形成されていることが望ましい。また、山の平坦
面と山の斜面とでなす内角が９０度以上１８０度未満で
あり、定盤に溝を設けた面積に対する山の平坦面の面積
割合を１５％以上４０％以下にすることを特徴とする磁
気ヘッド加工用定盤であることが望ましい。Here, it is desirable that the ridges provided on the above-mentioned surface plate be formed of one of a tin alloy, a copper alloy, and a lead alloy, which are non-ferrous metals with low hardness. In addition, the internal angle between the flat surface of the mountain and the slope of the mountain must be 90 degrees or more and less than 180 degrees, and the area ratio of the flat surface of the mountain to the area of the groove on the surface plate must be 15% or more and 40% or less. It is desirable that the surface plate for magnetic head processing be characterized by:
磁気ヘッド２の浮上面１１の加工は、第１図に示すよう
に、定盤上にラップ砥粒を塗り、図示への方向に往復さ
せることで砥粒により研磨されるようにして行なう。定
盤面は、あらかじめ曲率半径大になる所期の円筒面に曲
げておく。第３図により説明する。台１０の上にスペー
サ７を位置決めしてのせ、その上に定盤１をのせて中央
をボルト８とナツト９とで締めつけることによって定盤
面を曲率半径Ｒの所期の円筒面にしている。As shown in FIG. 1, the air bearing surface 11 of the magnetic head 2 is processed by applying lapping abrasive grains on a surface plate and moving the lap abrasive grains back and forth in the direction shown in the figure so that the abrasive grains polish the surface. The surface of the surface plate is bent in advance into a desired cylindrical surface with a large radius of curvature. This will be explained with reference to FIG. A spacer 7 is positioned and placed on a table 10, a surface plate 1 is placed on it, and the center is tightened with a bolt 8 and a nut 9, thereby making the surface of the surface plate a desired cylindrical surface with a radius of curvature R.
この定盤面でランプ加工すると、定盤１についている曲
率半径Ｒが、浮上面１１に転写されて浮上面１１は曲率
半径Ｒの円筒面となる。When ramp processing is performed on this surface plate surface, the radius of curvature R on the surface plate 1 is transferred to the air bearing surface 11, and the air bearing surface 11 becomes a cylindrical surface with a radius of curvature R.
定盤は第２図に示すように山部５と溝部６とが一定間隔
Ｐで形成しておき、山部５は山の平坦面３と斜面４とで
形成している。間隔Ｐはワークの長さの半分としておか
なければ実際に研磨することは不可能である。この場合
、定盤につけた溝は、磁気ヘッドを往復させることで、
定盤と浮上面との間にはいった余分な砥粒及び加工くず
の排出先となる。As shown in FIG. 2, the surface plate has a ridge 5 and a groove 6 formed at a constant interval P, and the ridge 5 is formed by a flat surface 3 and a slope 4 of the mountain. It is impossible to actually polish the workpiece unless the distance P is set to half the length of the workpiece. In this case, the grooves made on the surface plate are created by reciprocating the magnetic head.
This serves as a discharge destination for excess abrasive grains and machining debris that have fallen between the surface plate and the floating surface.
定盤に設けた山の平坦面３は、定盤面につけた曲率半径
大なる円筒面が、加工荷重によって崩れることを防ぐ作
用がある。この山の平坦面３の幅が狭い場合を第６図に
示す。磁気ヘッドがある部分の山部３ｂは弾性変形し、
元の山ある位置（−点鎖線で示す）よりも低くなってい
る。加工するためにＡ方向に往復した場合、磁気ヘッド
がない部分の弾性変形していない山部３ａに浮」二面１
１の端部２ａ及び２ｂがあたることとなる。このため端
部２ａ及び２ｂの加工量が多くなる。浮上面を均一に加
工するためにも山の平坦面１１は必らず必要となる。The flat surface 3 of the mountain provided on the surface plate has the function of preventing the cylindrical surface with a large radius of curvature attached to the surface plate from collapsing due to processing load. FIG. 6 shows a case where the width of the flat surface 3 of this mountain is narrow. The mountain portion 3b where the magnetic head is located is elastically deformed,
It is lower than the original position of the mountain (indicated by the - dotted chain line). When reciprocating in direction A for machining, the surface 1 floats on the peak 3a which is not elastically deformed in the area where the magnetic head is not present.
The ends 2a and 2b of 1 will come into contact. For this reason, the amount of processing on the end portions 2a and 2b increases. The flat surface 11 of the mountain is necessarily required in order to process the air bearing surface uniformly.
定盤１として第２図に示す溝形状をもった定盤を使用し
た。定盤面には山部５と溝６とがあり、山部５は山の平
坦面３と斜面４とから成っている。As the surface plate 1, a surface plate having a groove shape shown in FIG. 2 was used. The surface plate surface has a mountain portion 5 and a groove 6, and the mountain portion 5 is composed of a flat surface 3 of the mountain and a slope 4.
ある溝６と次の溝６との間隔Ｐは約０．４ ｍｍで、山
の平坦面３と斜面４とのなす内角θの角度を１５０度に
し、山の平坦面３の幅Ｗを６０以上１５０μｍ以下にし
た錫合金により形成した山をもつ定盤である。定盤面を
曲率半径大なる所期の円筒面にした状態を第３図に示す
。The interval P between one groove 6 and the next groove 6 is approximately 0.4 mm, the internal angle θ between the flat surface 3 of the mountain and the slope 4 is 150 degrees, and the width W of the flat surface 3 of the mountain is 60 mm. This is a surface plate having ridges formed of a tin alloy with a thickness of 150 μm or less. FIG. 3 shows a state in which the surface plate surface is a desired cylindrical surface with a large radius of curvature.
台１０の上にスペーサ７を位置決めしてのせ、その上に
定盤１をのせて中央をボルト８とナツト９とで締めつけ
ることにより定盤面を曲率半径大なる所期の円筒面にし
た。ここで、スペーサ７の間隔ｐを３００ｍとした場合
、定盤中央の凹ｌｈはほぼ０．７ ｖｘとする。これに
より曲率半径Ｒはほぼ１６ｍとなる。この定盤上でラン
プ液を塗り磁気へンド２の加工荷重を０．０７以上０．
２ Ｎ以下の範囲で第１図中のＡの方向に往復してラン
プ加工した。A spacer 7 is positioned and placed on a table 10, a surface plate 1 is placed on it, and the center is tightened with a bolt 8 and a nut 9, thereby making the surface of the surface plate a desired cylindrical surface with a large radius of curvature. Here, when the interval p between the spacers 7 is 300 m, the recess lh at the center of the surface plate is approximately 0.7 vx. As a result, the radius of curvature R becomes approximately 16 m. Apply lamp liquid on this surface plate and increase the machining load of the magnetic head 2 by 0.07 or more.
The ramp was processed by moving back and forth in the direction of A in FIG. 1 within a range of 2 N or less.
磁気ヘッド浮上面は砥粒により研磨されるため、定盤の
曲率半径が転写された円筒面となる。Since the magnetic head air bearing surface is polished with abrasive grains, it becomes a cylindrical surface onto which the radius of curvature of the surface plate is transferred.
ここで定盤の山の平坦面３の幅が６０μｍ未満と狭い場
合の様子を第６図に示す。定盤２につけた曲率半径大な
る所期の円筒面を一点鎖線で表わしている。磁気ヘッド
がある部分の山部３ｂが弾性変形し、元の山の高さ３ａ
よりも低くなっている。山の頂部の平坦面３の面積が小
さいため加工荷重による山部の弾性変形量が磁気ヘッド
２の浮上面の凸量ｔ （はぼ０．１μｍ）に比べて無視
できなくなる。このため、浮上面２の端部２ａの加工量
が多くなっていわゆるダレを生じる。このことは均一な
円筒面に仕上げることが困難であるということである。FIG. 6 shows a case where the flat surface 3 of the surface plate has a narrow width of less than 60 μm. The intended cylindrical surface with a large radius of curvature attached to the surface plate 2 is represented by a chain line. The mountain portion 3b where the magnetic head is located is elastically deformed, and the original height of the mountain 3a is reduced.
It is lower than. Since the area of the flat surface 3 at the top of the ridge is small, the amount of elastic deformation of the ridge due to the processing load cannot be ignored compared to the amount of convexity t (approximately 0.1 μm) of the air bearing surface of the magnetic head 2. For this reason, the amount of processing on the end portion 2a of the air bearing surface 2 increases, resulting in so-called sag. This means that it is difficult to finish a uniform cylindrical surface.
また、定盤の山の頂部平坦面の幅が１５０μｍ以上の場
合について述べる。この場合には平坦面の幅が広いため
、砥粒及び加工くずが溝に排出していくまでに距離があ
る。そのため山の平坦面３と磁気ヘッド２との間に砥粒
及び加工ぐずが入り、転動するので浮上面２に傷が生し
る。このことは平滑な面に仕上げることが困難であると
いうことである。Further, a case will be described in which the width of the flat surface at the top of the ridge of the surface plate is 150 μm or more. In this case, since the width of the flat surface is wide, there is a distance for the abrasive grains and processing waste to be discharged into the groove. As a result, abrasive grains and machining debris get trapped between the flat surface 3 of the mountain and the magnetic head 2, and the magnetic head 2 rolls, causing scratches on the air bearing surface 2. This means that it is difficult to finish it into a smooth surface.
以上のように、定盤に溝を設け、山を錫合金で形成した
場合山の頂部平坦面の面積割合を１５％以上４０％以下
とすることによって、従来のクラウン加工で不充分であ
った浮上面の傷を大幅に減少させるとともに、均一な円
筒面に仕上げることが可能となった。As mentioned above, when grooves are provided on the surface plate and the peaks are formed of tin alloy, the area ratio of the flat surface at the top of the peaks is set to 15% or more and 40% or less, thereby solving the problem that conventional crown processing is insufficient. This significantly reduces the number of scratches on the air bearing surface and makes it possible to finish it with a uniform cylindrical surface.
さらに、山の材質を錫合金以外とした場合には、山の平
坦面の幅をある範囲内に規定しておけば、以上の例と同
様に浮上面の傷を大幅に減少させるとともに、均一な円
筒面に仕上げることが可能である。Furthermore, when the material of the mountain is other than a tin alloy, if the width of the flat surface of the mountain is specified within a certain range, as in the above example, scratches on the air bearing surface can be greatly reduced, and it can be made evenly. It is possible to finish it into a cylindrical surface.
本発明によれば、従来磁気ヘッドの浮上面のクラウン加
工で不充分であった表面粗さを大幅に向上することがで
きる。また、端部にダレの生じない均一な円筒面に磁気
ヘッドの浮上面を仕上げることができる。According to the present invention, it is possible to significantly improve the surface roughness, which was insufficient in conventional crown processing of the air bearing surface of a magnetic head. Furthermore, the air bearing surface of the magnetic head can be finished into a uniform cylindrical surface without sag at the end.
第１図は本発明に係わる定盤と磁気ヘッドの断面図、第
２図は、本考案による一実施例を示す定盤の断面図、第
３図は定盤を曲げる方法を表わした図、第４図は磁気ヘ
ッドの浮上面を表わした図、第５図は平滑な定盤の加工
中の変形を表わした図、第６図は溝付き定盤の加工中の
変形を表わした図である。
１：定盤、２：磁気ヘッド、３：山の平坦面、４：斜面
、５：山部、６：溝、ｌｌ：浮上面。
第
図
第
図
第
図
第
図FIG. 1 is a sectional view of a surface plate and a magnetic head according to the present invention, FIG. 2 is a sectional view of a surface plate showing an embodiment of the present invention, and FIG. 3 is a diagram showing a method of bending the surface plate. Figure 4 shows the air bearing surface of the magnetic head, Figure 5 shows the deformation of a smooth surface plate during machining, and Figure 6 shows the deformation of a grooved surface plate during machining. be. 1: Surface plate, 2: Magnetic head, 3: Flat surface of mountain, 4: Slope, 5: Mountain part, 6: Groove, ll: Air bearing surface. Figure Figure Figure Figure
Claims (1)
筒面にラップ加工するために上面を凹に曲げて円筒面を
供する定盤において、定盤面に多列の溝を設けてあり、
山の材質は非鉄金属であり定盤を曲げる前の状態で、多
列の溝は、定間隔をもった山の斜面が対向して交差する
ように並立し、山の頂部は平坦面であってこの平坦面の
すべてが同一平面にあることを特徴とする磁気ヘッド加
工用定盤。 ２、請求項第１項において定盤に設ける山は、低硬度の
非鉄金属である錫合金または、銅合金、鉛合金のいずれ
か一つの材料で形成し、山の平坦面と山の斜面とでなす
内角が９０度以上１８０度未満であり、定盤に溝を設け
た面積に対する山の頂部平坦面の面積割合を１５％以上
４０％以下にすることを特徴とする磁気ヘッド加工用定
盤。[Claims] 1. In a surface plate whose upper surface is bent concavely to provide a cylindrical surface for lapping the air bearing surface of a magnetic head for magnetic recording into a cylindrical surface with a large radius of curvature, the surface plate has multiple rows of grooves. There is a
The material of the mountain is non-ferrous metal, and before the surface plate is bent, the multiple rows of grooves are lined up so that the slopes of the mountain face each other at regular intervals, and the top of the mountain is a flat surface. A magnetic head processing surface plate characterized by all of the flat surfaces of the levers being on the same plane. 2. In claim 1, the mountain provided on the surface plate is made of one of a low hardness nonferrous metal such as a tin alloy, a copper alloy, or a lead alloy, and the flat surface of the mountain and the slope of the mountain are A surface plate for magnetic head processing, characterized in that the internal angle formed by the surface plate is 90 degrees or more and less than 180 degrees, and the area ratio of the flat surface at the top of the mountain to the area of the groove on the surface plate is 15% or more and 40% or less. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25302688A JPH02100843A (en) | 1988-10-07 | 1988-10-07 | Surface plate for working magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25302688A JPH02100843A (en) | 1988-10-07 | 1988-10-07 | Surface plate for working magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02100843A true JPH02100843A (en) | 1990-04-12 |
Family
ID=17245450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25302688A Pending JPH02100843A (en) | 1988-10-07 | 1988-10-07 | Surface plate for working magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02100843A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6565414B2 (en) * | 1999-10-25 | 2003-05-20 | Tdk Corporation | Polishing apparatus for magnetic head and method therefor |
-
1988
- 1988-10-07 JP JP25302688A patent/JPH02100843A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6565414B2 (en) * | 1999-10-25 | 2003-05-20 | Tdk Corporation | Polishing apparatus for magnetic head and method therefor |
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