JPH0199036U - - Google Patents
Info
- Publication number
- JPH0199036U JPH0199036U JP19640887U JP19640887U JPH0199036U JP H0199036 U JPH0199036 U JP H0199036U JP 19640887 U JP19640887 U JP 19640887U JP 19640887 U JP19640887 U JP 19640887U JP H0199036 U JPH0199036 U JP H0199036U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- thick part
- diameter
- pressure sensor
- formed outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 4
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の一実施例の概略構成を示す断
面図、第２図は従来の静電容量式圧力センサの概
略構成を示す断面図である。
２，３……絶縁体、１５……ダイヤフラム、１
６，１７……電極、１８……中央厚肉部、１９…
…薄肉部、２０……外側厚肉部。
FIG. 1 is a cross-sectional view showing the schematic structure of an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing the schematic structure of a conventional capacitive pressure sensor. 2, 3...Insulator, 15...Diaphragm, 1
6, 17...electrode, 18...center thick part, 19...
... Thin wall part, 20... Outer thick wall part.
Claims (1)
厚肉部を支持する薄肉部とこの外側に形成されて
前記厚肉部と同じ厚さの外側厚肉部とから成るダ
イヤフラムと、このダイヤフラムの両側に配設さ
れた２つの絶縁体と、この各絶縁体の前記ダイヤ
フラムに面する側の表面にそれぞれ設けられた円
形の電極とから成る静電容量式圧力センサにおい
て、前記各電極の直径を前記ダイヤフラムの中央
厚肉部の直径よりも大きく形成したことを特徴と
する静電容量式圧力センサ。 A diaphragm consisting of a circular central thick part, a thin part formed outside the circular central thick part to support the thick part, and an outer thick part formed outside the thick part and having the same thickness as the thick part, and this diaphragm. In a capacitive pressure sensor consisting of two insulators disposed on both sides of the insulator and circular electrodes provided on the surface of each insulator facing the diaphragm, the diameter of each electrode is A capacitive pressure sensor characterized in that the diameter of the diaphragm is larger than the diameter of the central thick portion of the diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19640887U JPH0199036U (en) | 1987-12-24 | 1987-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19640887U JPH0199036U (en) | 1987-12-24 | 1987-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199036U true JPH0199036U (en) | 1989-07-03 |
Family
ID=31487023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19640887U Pending JPH0199036U (en) | 1987-12-24 | 1987-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199036U (en) |
-
1987
- 1987-12-24 JP JP19640887U patent/JPH0199036U/ja active Pending