JPH0199035U - - Google Patents
Info
- Publication number
- JPH0199035U JPH0199035U JP19496087U JP19496087U JPH0199035U JP H0199035 U JPH0199035 U JP H0199035U JP 19496087 U JP19496087 U JP 19496087U JP 19496087 U JP19496087 U JP 19496087U JP H0199035 U JPH0199035 U JP H0199035U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- substrate
- external electrode
- conductor film
- sensor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19496087U JPH0199035U (fr) | 1987-12-23 | 1987-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19496087U JPH0199035U (fr) | 1987-12-23 | 1987-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0199035U true JPH0199035U (fr) | 1989-07-03 |
Family
ID=31485659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19496087U Pending JPH0199035U (fr) | 1987-12-23 | 1987-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0199035U (fr) |
-
1987
- 1987-12-23 JP JP19496087U patent/JPH0199035U/ja active Pending