JPH0198173U - - Google Patents

Info

Publication number
JPH0198173U
JPH0198173U JP19291987U JP19291987U JPH0198173U JP H0198173 U JPH0198173 U JP H0198173U JP 19291987 U JP19291987 U JP 19291987U JP 19291987 U JP19291987 U JP 19291987U JP H0198173 U JPH0198173 U JP H0198173U
Authority
JP
Japan
Prior art keywords
epitaxial growth
support member
substrate
liquid phase
accommodates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19291987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19291987U priority Critical patent/JPH0198173U/ja
Publication of JPH0198173U publication Critical patent/JPH0198173U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP19291987U 1987-12-18 1987-12-18 Pending JPH0198173U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19291987U JPH0198173U (en:Method) 1987-12-18 1987-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19291987U JPH0198173U (en:Method) 1987-12-18 1987-12-18

Publications (1)

Publication Number Publication Date
JPH0198173U true JPH0198173U (en:Method) 1989-06-30

Family

ID=31483746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19291987U Pending JPH0198173U (en:Method) 1987-12-18 1987-12-18

Country Status (1)

Country Link
JP (1) JPH0198173U (en:Method)

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