JPH0198162U - - Google Patents
Info
- Publication number
- JPH0198162U JPH0198162U JP19248387U JP19248387U JPH0198162U JP H0198162 U JPH0198162 U JP H0198162U JP 19248387 U JP19248387 U JP 19248387U JP 19248387 U JP19248387 U JP 19248387U JP H0198162 U JPH0198162 U JP H0198162U
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnetron cathode
- coaxial magnetron
- grid
- magnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011295 pitch Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19248387U JPH0198162U (un) | 1987-12-17 | 1987-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19248387U JPH0198162U (un) | 1987-12-17 | 1987-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0198162U true JPH0198162U (un) | 1989-06-30 |
Family
ID=31483340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19248387U Pending JPH0198162U (un) | 1987-12-17 | 1987-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0198162U (un) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962385A (un) * | 1972-10-20 | 1974-06-17 |
-
1987
- 1987-12-17 JP JP19248387U patent/JPH0198162U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4962385A (un) * | 1972-10-20 | 1974-06-17 |