JPH0197567U - - Google Patents

Info

Publication number

JPH0197567U

JPH0197567U JP19431887U JP19431887U JPH0197567U JP H0197567 U JPH0197567 U JP H0197567U JP 19431887 U JP19431887 U JP 19431887U JP 19431887 U JP19431887 U JP 19431887U JP H0197567 U JPH0197567 U JP H0197567U

Authority

JP

Japan

Prior art keywords

insulating film

gate insulating

field effect

semiconductor substrate

semiconductor device

Prior art date

1987-12-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 3
• 238000002955 isolation Methods 0.000 claims description 2
• 230000005669 field effect Effects 0.000 claims 2
• 238000000034 method Methods 0.000 claims 1
• 230000007547 defect Effects 0.000 description 1
• 239000012535 impurity Substances 0.000 description 1