JPH0197555U - - Google Patents
Info
- Publication number
- JPH0197555U JPH0197555U JP19431587U JP19431587U JPH0197555U JP H0197555 U JPH0197555 U JP H0197555U JP 19431587 U JP19431587 U JP 19431587U JP 19431587 U JP19431587 U JP 19431587U JP H0197555 U JPH0197555 U JP H0197555U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- substrate storage
- storage box
- external frame
- clean air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19431587U JPH0197555U (ru) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19431587U JPH0197555U (ru) | 1987-12-21 | 1987-12-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0197555U true JPH0197555U (ru) | 1989-06-29 |
Family
ID=31485047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19431587U Pending JPH0197555U (ru) | 1987-12-21 | 1987-12-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0197555U (ru) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013125957A (ja) * | 2011-12-16 | 2013-06-24 | Mitsubishi Electric Corp | ウエハ冷却保管庫 |
JP2013187264A (ja) * | 2012-03-06 | 2013-09-19 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
-
1987
- 1987-12-21 JP JP19431587U patent/JPH0197555U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013125957A (ja) * | 2011-12-16 | 2013-06-24 | Mitsubishi Electric Corp | ウエハ冷却保管庫 |
JP2013187264A (ja) * | 2012-03-06 | 2013-09-19 | Shin Etsu Polymer Co Ltd | 基板収納容器 |