JPH0197553U - - Google Patents

Info

Publication number

JPH0197553U

JPH0197553U JP19383287U JP19383287U JPH0197553U JP H0197553 U JPH0197553 U JP H0197553U JP 19383287 U JP19383287 U JP 19383287U JP 19383287 U JP19383287 U JP 19383287U JP H0197553 U JPH0197553 U JP H0197553U

Authority

JP

Japan

Prior art keywords

cassette

processing equipment

exit

inlet

transfer robot

Prior art date

1987-12-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2

Cited By (1)