JPH0197549U - - Google Patents
Info
- Publication number
- JPH0197549U JPH0197549U JP19497587U JP19497587U JPH0197549U JP H0197549 U JPH0197549 U JP H0197549U JP 19497587 U JP19497587 U JP 19497587U JP 19497587 U JP19497587 U JP 19497587U JP H0197549 U JPH0197549 U JP H0197549U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- excitation coils
- excitation
- sample chamber
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 6
- 230000000052 comparative effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19497587U JPH0197549U (el) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19497587U JPH0197549U (el) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197549U true JPH0197549U (el) | 1989-06-29 |
Family
ID=31485674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19497587U Pending JPH0197549U (el) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197549U (el) |
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1987
- 1987-12-22 JP JP19497587U patent/JPH0197549U/ja active Pending