JPH0197547U - - Google Patents
Info
- Publication number
- JPH0197547U JPH0197547U JP1987194548U JP19454887U JPH0197547U JP H0197547 U JPH0197547 U JP H0197547U JP 1987194548 U JP1987194548 U JP 1987194548U JP 19454887 U JP19454887 U JP 19454887U JP H0197547 U JPH0197547 U JP H0197547U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- view
- work holder
- fitting disk
- inner work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19454887U JPH058673Y2 (enExample) | 1987-12-22 | 1987-12-22 | |
| KR1019890700595A KR930003136B1 (ko) | 1987-10-14 | 1988-10-14 | 프라즈마 cvd에 의한 박막 형성장치 |
| EP88908981A EP0336979B1 (en) | 1987-10-14 | 1988-10-14 | Apparatus for thin film formation by plasma cvd |
| PCT/JP1988/001043 WO1989003587A1 (fr) | 1987-10-14 | 1988-10-14 | Procede et dispositif de formation de films minces par depot de vapeur chimique au plasma |
| US07/368,312 US4991542A (en) | 1987-10-14 | 1988-10-14 | Method of forming a thin film by plasma CVD and apapratus for forming a thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19454887U JPH058673Y2 (enExample) | 1987-12-22 | 1987-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0197547U true JPH0197547U (enExample) | 1989-06-29 |
| JPH058673Y2 JPH058673Y2 (enExample) | 1993-03-04 |
Family
ID=31485274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19454887U Expired - Lifetime JPH058673Y2 (enExample) | 1987-10-14 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058673Y2 (enExample) |
-
1987
- 1987-12-22 JP JP19454887U patent/JPH058673Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058673Y2 (enExample) | 1993-03-04 |