JPH0197339U

JPH0197339U -

Info

Publication number: JPH0197339U
Application number: JP19274087U
Authority: JP
Priority date: 1987-12-21
Filing date: 1987-12-21
Publication date: 1989-06-28

Description

[Brief explanation of the drawing]

第１図は本考案に係るフオトレジスト用露光装
置の第１の実施例を示した断面図、第２図は第１
図における―線断面図である。第３図は本考
案に係るフオトレジスト用露光装置の第２の実施
例を示した一部断面図である。第４図は従来のフ
オトレジスト用露光装置を示した概略図、第５図
は第４図における―線断面図である。１…被露光物、２…本体、２０…露光室、２３
…投入口、２４…取出口、３…透明板、４…上透
明ベルト、５…下透明ベルト、６…駆動ベルト、
７…バキユームポンプ。 FIG. 1 is a sectional view showing a first embodiment of a photoresist exposure apparatus according to the present invention, and FIG.
It is a sectional view taken along the line - in the figure. FIG. 3 is a partial sectional view showing a second embodiment of the photoresist exposure apparatus according to the present invention. FIG. 4 is a schematic diagram showing a conventional exposure apparatus for photoresist, and FIG. 5 is a sectional view taken along the line -- in FIG. 1...Exposed object, 2...Main body, 20...Exposure chamber, 23
...Input port, 24...Output port, 3...Transparent plate, 4...Upper transparent belt, 5...Lower transparent belt, 6...Drive belt,
7... Vacuum pump.

Claims

[Scope of utility model registration request]

A main body, an exposure chamber that simultaneously exposes both sides of the object to be exposed, an inlet and an outlet for the object to be exposed provided at both ends of the exposure chamber, and a section from the inlet to the outlet of the exposure chamber. A transparent plate is arranged so as to be divided into upper and lower halves, and the objects are arranged vertically and endlessly on the transparent plate from the inlet to the outlet, and the object to be exposed is sandwiched between the upper and lower sides and the object is passed through the exposure chamber from the inlet to the outlet. The upper transparent belt and the lower transparent belt whose width is smaller than the width of the upper transparent belt are conveyed to the take-out port, and the upper transparent belt and the lower transparent belt are connected to the upper transparent belt and the lower transparent belt to feed the upper transparent belt and the lower transparent belt on the transparent plate. a drive mechanism that moves the handle from the opening to the handle opening;
The upper transparent belt is connected between the upper transparent belt and the lower transparent belt, and the air between the upper transparent belt and the lower transparent belt on the transparent plate is sucked, and the exposed object is sandwiched between the upper transparent belt and the lower transparent belt. A photoresist exposure device characterized by comprising a vacuum mechanism for bringing the belt into close contact with the photoresist.