JPH0197245U - - Google Patents
Info
- Publication number
- JPH0197245U JPH0197245U JP19389187U JP19389187U JPH0197245U JP H0197245 U JPH0197245 U JP H0197245U JP 19389187 U JP19389187 U JP 19389187U JP 19389187 U JP19389187 U JP 19389187U JP H0197245 U JPH0197245 U JP H0197245U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- flow
- adjustment section
- flow rate
- rate adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Measuring Volume Flow (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987193891U JPH0514198Y2 (un) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987193891U JPH0514198Y2 (un) | 1987-12-21 | 1987-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0197245U true JPH0197245U (un) | 1989-06-28 |
| JPH0514198Y2 JPH0514198Y2 (un) | 1993-04-15 |
Family
ID=31484657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987193891U Expired - Lifetime JPH0514198Y2 (un) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514198Y2 (un) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020153948A (ja) * | 2019-03-22 | 2020-09-24 | 野村マイクロ・サイエンス株式会社 | 微粒子測定システムの洗浄方法及び超純水製造システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01118748A (ja) * | 1987-10-31 | 1989-05-11 | Canon Inc | 粒子解析装置 |
-
1987
- 1987-12-21 JP JP1987193891U patent/JPH0514198Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01118748A (ja) * | 1987-10-31 | 1989-05-11 | Canon Inc | 粒子解析装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020153948A (ja) * | 2019-03-22 | 2020-09-24 | 野村マイクロ・サイエンス株式会社 | 微粒子測定システムの洗浄方法及び超純水製造システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0514198Y2 (un) | 1993-04-15 |