JPH0197232U - - Google Patents

Info

Publication number

JPH0197232U

JPH0197232U JP19365787U JP19365787U JPH0197232U JP H0197232 U JPH0197232 U JP H0197232U JP 19365787 U JP19365787 U JP 19365787U JP 19365787 U JP19365787 U JP 19365787U JP H0197232 U JPH0197232 U JP H0197232U

Authority

JP

Japan

Prior art keywords

thin

generating portion

strain

pressure

sensor chip

Prior art date

1987-12-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims 2
• 238000009792 diffusion process Methods 0.000 claims 1
• 238000005468 ion implantation Methods 0.000 claims 1
• 238000005259 measurement Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000011521 glass Substances 0.000 description 1
• 238000009413 insulation Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (2)