JPH0195637U - - Google Patents

Info

Publication number
JPH0195637U
JPH0195637U JP19191987U JP19191987U JPH0195637U JP H0195637 U JPH0195637 U JP H0195637U JP 19191987 U JP19191987 U JP 19191987U JP 19191987 U JP19191987 U JP 19191987U JP H0195637 U JPH0195637 U JP H0195637U
Authority
JP
Japan
Prior art keywords
thermocouple
wavy
mounting structure
guide tube
spiral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19191987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19191987U priority Critical patent/JPH0195637U/ja
Publication of JPH0195637U publication Critical patent/JPH0195637U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)
JP19191987U 1987-12-17 1987-12-17 Pending JPH0195637U (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19191987U JPH0195637U (US06650917-20031118-M00005.png) 1987-12-17 1987-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19191987U JPH0195637U (US06650917-20031118-M00005.png) 1987-12-17 1987-12-17

Publications (1)

Publication Number Publication Date
JPH0195637U true JPH0195637U (US06650917-20031118-M00005.png) 1989-06-23

Family

ID=31482803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19191987U Pending JPH0195637U (US06650917-20031118-M00005.png) 1987-12-17 1987-12-17

Country Status (1)

Country Link
JP (1) JPH0195637U (US06650917-20031118-M00005.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010185766A (ja) * 2009-02-12 2010-08-26 Kobelco Eco-Solutions Co Ltd 撹拌装置
JP2022072048A (ja) * 2020-10-29 2022-05-17 株式会社Kokusai Electric 温度センサ、ヒータユニット、基板処理装置及び半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010185766A (ja) * 2009-02-12 2010-08-26 Kobelco Eco-Solutions Co Ltd 撹拌装置
JP2022072048A (ja) * 2020-10-29 2022-05-17 株式会社Kokusai Electric 温度センサ、ヒータユニット、基板処理装置及び半導体装置の製造方法

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